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Substrate material: High-resistivity silicon Substrate thickness: 275 µm Dielectric constant: 11.8 Nominal Z0: 50 Ω
Die-to-die stepping time of under 100 ms Up to 20 dies/sec (70,000 dies/hour) with MultiDie Testing technology Even extreme variations in height, such as the case with warped wafers, can be compensated
Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 20 K (liquid helium)
Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Probe positioners placed inside vacuum chamber Short and stable probe arms
Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Probe positioners placed inside vacuum chamber Short and stable probe arms
Different substrate carriers for wafers up to 100 mm or single dies Up to six positioners Independently cooled cold shield Probe positioners placed inside vacuum chamber
Different substrate carriers for wafers up to 150 mm or single dies Up to six positioners Probe positioners placed inside vacuum chamber Short and stable probe arms
Highly stable granite base Independent, coarse movement of X and Y axes, combined with easy fine adjustments Re-configurable for DC, RF, mmW, FA, WLR and more Full thermal range of -60°C to +300°C
Highly stable granite base Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges Re-configurable for DC, RF, mmW, FA, WLR and more
Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Independently cooled cold shield Probe positioners placed inside vacuum chamber
Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Probe positioners placed inside vacuum chamber Short and stable probe arms
DC, RF and Optical Probe Positioning for Highest Accuracy Measurements FormFactor offers a wide variety of manual and motorized probe positioners for any application from DC to terahertz measurements and beyond.