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Substrate material: High-resistivity silicon
Substrate thickness: 275 µm
Dielectric constant: 11.8
Nominal Z0: 50 Ω
Die-to-die stepping time of under 100 ms
Up to 20 dies/sec (70,000 dies/hour) with MultiDie Testing technology
Even extreme variations in height, such as the case with warped wafers, can be compensated
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 20 K (liquid helium)
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Different substrate carriers for wafers up to 100 mm or single dies
Up to six positioners
Independently cooled cold shield
Probe positioners placed inside vacuum chamber
Different substrate carriers for wafers up to 150 mm or single dies
Up to six positioners
Probe positioners placed inside vacuum chamber
Short and stable probe arms
Highly stable granite base
Independent, coarse movement of X and Y axes, combined with easy fine adjustments
Re-configurable for DC, RF, mmW, FA, WLR and more
Full thermal range of -60°C to +300°C
Highly stable granite base
Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
Re-configurable for DC, RF, mmW, FA, WLR and more
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Independently cooled cold shield
Probe positioners placed inside vacuum chamber
Different substrate carriers for wafers up to 200 mm or single dies
Probe cards and/or up to eight positioners
Probe positioners placed inside vacuum chamber
Short and stable probe arms
DC, RF and Optical Probe Positioning for Highest Accuracy Measurements
FormFactor offers a wide variety of manual and motorized probe positioners for any application from DC to terahertz measurements and beyond.