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Designed for use with specific Probe Systems Tables to suit all facility requirements and applications Stable probing, even in submicron range Granite platen ensures rigidity and temperature stability
Supports up to 12 VNA ports than can be mapped to four logical ports for calibration Extensive guidance, wizards and management features automate calibration setup, measurement, result data conversion and report creation LRRM-SOLT, multi-line TRL and second-tier calibration methods enable precision and simple multi-port calibrations
Full-radius, nickel-plated tungsten needles Power bypass inductance: 16 nH Supports collinear and non-standard needle configurations Support up to a maximum of 12 ceramic blades DC needles / contacts
Cryogen-free option available Flexible sample space Low noise, low vibration Long holding time Stable He-3 pot temperature
Load-lock chamber: Cycle devices 10X faster in a cryogenic environment High-density electrical interface at cryogenic temperatures: More pins on the device enables more test structures to be probed with a single cooldown
Wafer temp verified <4.5 K (with 44 RF probes in contact) ​ Magnetic field suppression to <200 nT Easy exchange of customizable probe cards Configurable for 150 mm, 200 mm and 300 mm wafers
Low running costs, less vibration, less noise, reduced maintenance Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates CMN calibrated thermometry on MC plate
Low running costs, less vibration, less noise, reduced maintenance Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates CMN calibrated thermometry on MC plate
Low running costs, less vibration, less noise, reduced maintenance Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates CMN calibrated thermometry on MC plate
Fully isolated experiment space for true 4K temperatures during probing Cryogenic positioners to provide large travel ranges without warming up the device Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
Fully isolated experiment space for true 4K temperatures during probing Cryogenic positioners to provide large travel ranges without warming up the device Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
Ultra Low Temperature Pulse tube cryocooler for cryogen free 4K temperatures Two stage ADR provides solid state cooling down to 30mK