Flexibility Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Optional thermal chuck (-60°C to 300°C) and pressure regulation Accessories available, such as black bodies and optical motion analysis tools Optional upgrade for 300 mm wafer Designed for industrial environments Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO) Ideal for small structures See "Specifications & Details" tab for more key features

Flexibility Different substrate carriers for wafers up to 100 mm or single dies Up to six positioners Use with liquid nitrogen or helium, depending on the target temperature Probing with an open chamber lid possible under atmospheric condition Specially designed for laboratory environments Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO) See "Specifications & Details" tab for more key features

Flexibility Different substrate carriers for wafers up to 150 mm or single dies Up to six positioners Optional thermal chuck (-60°C to 300°C) and pressure regulation Probing with an open chamber lid possible under atmospheric condition Specially designed for laboratory environments Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO) See "Specifications & Details" tab for more key features

Superior Mechanics Highly stable granite base Independent, coarse movement of X and Y axes, combined with easy fine adjustments Excellent measurement accuracy and repeatability Fast navigation and high-precision probe positioning See "Specifications & Details" tab for more key features

Superior Mechanics Highly stable granite base Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges 1 µm repeatable separation stroke Excellent measurement accuracy and repeatability Fast navigation and high-precision probe positioning See "Specifications & Details" tab for more key features

Flexibility Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Use with liquid nitrogen or helium, depending on the target temperature Accessories available, such as black bodies and optical motion analysis tools Designed for industrial environments Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO) See "Specifications & Details" tab for more key features

Flexibility Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Optional thermal chuck (-60°C to 300°C) and pressure regulation Accessories available, such as black bodies and optical motion analysis tools Optional upgrade for 300 mm wafer Designed for industrial environments Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO) Ideal for small structures See "Specifications & Details" tab for more key features

DC, RF and Optical Probe Positioning for Highest Accuracy Measurements FormFactor offers a wide variety of manual and motorized probe positioners for any application from DC to terahertz measurements and beyond.

Accommodates a combination of up to four Cascade Microtech probes Configurable for mixed-signal RF/mmW testing Quick and easy repairs to be performed in the field, by simply replacing individual probes Adaptable to new device layouts by exchanging individual probes

Choice of Series resistance or Termination (signal line to ground) Use of High Performance RF Resistors Choice of Resistor values available Choice of body styles, Infinity, ACP or FPC Can help to stabilize oscillations in high-gain devices Impedance match to low dynamic resistance laser diodes Custom configured for your application

Light-tight version and EMI-shielded version for low noise and light-sensitive measurements Application flexibility, ideal for use in high frequency applications Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system Suitable for integration with vibration isolating tables

High flexibility Re-configurable for DC, RF, mmW, FA, WLR and more Thermal range: -60˚C to 300˚C available Upgrade path to meet your future needs Stable and repeatable measurements over a wide thermal range See "Specifications & Details" tab for more key features