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The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.

Manufactured By: FormFactor, Inc.

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All CSR calibration substrates include the Open standard on the substrate itself, providing a more accurate calibration when compared to simply lifting the probes for Open. Since our probe systems are used in the laser-trimming process, the typical accuracy is better than 0.1% for all Load standards. Also, the resistance of the Load standard remains stable within 0.3% of the ideal value (50 Ω), over a temperature range from 10 to 430 K.

Finally, the design of the Line standard is optimized, resulting in accuracy of the characteristic impedance within 1.0% of the ideal value (50 Ω) for frequencies up to 110 GHz and beyond. For these reasons, the CSR family guarantees the best calibration, and thus the most accurate measurements.

FormFactor Probe Selection Guide.pdf

Calibration Standard

Part Number	Description	Pitch (µm)	PDF
41702	\|Z\| Probe, CSR-4, GSG	250 to 500	CSR-4
41704	\|Z\| Probe, CSR-5, GS/SG	250 to 500	CSR-5
56407	\|Z\| Probe, CSR-6, GS/SG	50 to 250	CSR-6
62025	\|Z\| Probe, CSR-8, GSG	100 to 250	CSR-8
73319	\|Z\| Probe, CSR-9, GSG	50 to 150	CSR-9
62563	\|Z\| Probe, CSR-15, GSG	500 to 1250	CSR-15
69061	\|Z\| Probe, CSR-16, GS/SG	500 to 1250	CSR-16
71391	\|Z\| Probe, CSR-17, GSG	1000 to 2500
67074	\|Z\| Probe, CSR-18, GS/SG	1000 to 2500
51077	\|Z\| Probe, CSR-30, GSGSG	100	CSR-30
51078	\|Z\| Probe, CSR-31, GSGSG	150	CSR-31
51079	\|Z\| Probe, CSR-32, GSGSG	200	CSR-32
51080	\|Z\| Probe, CSR-33, GSGSG	250	CSR-33
51081	\|Z\| Probe, CSR-34, GSGSG	500	CSR-34
51082	\|Z\| Probe, CSR-35, GSGSG	125	CSR-35
51874	\|Z\| Probe, CSR-41, GSSG	125 to 150	CSR-41
51875	\|Z\| Probe, CSR-43, GSSG	200 to 250	CSR-43
51876	\|Z\| Probe, CSR-44, GSSG	400 to 600	CSR-44
52379	\|Z\| Probe, CSR-40, GSSG	100	CSR-40
53527	\|Z\| Probe, CSR-50, SGS	100	CSR-50
53528	\|Z\| Probe, CSR-51, SGS	125 to 150	CSR-51
53529	\|Z\| Probe, CSR-53, SGS	200 to 250	CSR-53
53530	\|Z\| Probe, CSR-54, SGS	400 to 500	CSR-54
71392	\|Z\| Probe, CSR-101, GSG/GS/SG	100 to 300	CSR-101
136643	\|Z\| Probe, Calibration substrate in a silicon wafer

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FormFactor - Cascade CSR Cal Substrates - Perfectly matched to the |Z| Probe®