FormFactor - Cascade CSR Cal Substrates - Perfectly matched to the |Z| Probe®
The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.
All CSR calibration substrates include the Open standard on the substrate itself, providing a more accurate calibration when compared to simply lifting the probes for Open. Since our probe systems are used in the laser-trimming process, the typical accuracy is better than 0.1% for all Load standards. Also, the resistance of the Load standard remains stable within 0.3% of the ideal value (50 Ω), over a temperature range from 10 to 430 K.
Finally, the design of the Line standard is optimized, resulting in accuracy of the characteristic impedance within 1.0% of the ideal value (50 Ω) for frequencies up to 110 GHz and beyond. For these reasons, the CSR family guarantees the best calibration, and thus the most accurate measurements.
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Calibration Standard
| Part Number | Description | Pitch (µm) | |
| 41702 | |Z| Probe, CSR-4, GSG | 250 to 500 | |
| 41704 | |Z| Probe, CSR-5, GS/SG | 250 to 500 | |
| 56407 | |Z| Probe, CSR-6, GS/SG | 50 to 250 | |
| 62025 | |Z| Probe, CSR-8, GSG | 100 to 250 | |
| 73319 | |Z| Probe, CSR-9, GSG | 50 to 150 | |
| 62563 | |Z| Probe, CSR-15, GSG | 500 to 1250 | |
| 69061 | |Z| Probe, CSR-16, GS/SG | 500 to 1250 | |
| 71391 | |Z| Probe, CSR-17, GSG | 1000 to 2500 | |
| 67074 | |Z| Probe, CSR-18, GS/SG | 1000 to 2500 | |
| 51077 | |Z| Probe, CSR-30, GSGSG | 100 | |
| 51078 | |Z| Probe, CSR-31, GSGSG | 150 | |
| 51079 | |Z| Probe, CSR-32, GSGSG | 200 | |
| 51080 | |Z| Probe, CSR-33, GSGSG | 250 | |
| 51081 | |Z| Probe, CSR-34, GSGSG | 500 | |
| 51082 | |Z| Probe, CSR-35, GSGSG | 125 | |
| 51874 | |Z| Probe, CSR-41, GSSG | 125 to 150 | |
| 51875 | |Z| Probe, CSR-43, GSSG | 200 to 250 | |
| 51876 | |Z| Probe, CSR-44, GSSG | 400 to 600 | |
| 52379 | |Z| Probe, CSR-40, GSSG | 100 | |
| 53527 | |Z| Probe, CSR-50, SGS | 100 | |
| 53528 | |Z| Probe, CSR-51, SGS | 125 to 150 | |
| 53529 | |Z| Probe, CSR-53, SGS | 200 to 250 | |
| 53530 | |Z| Probe, CSR-54, SGS | 400 to 500 | |
| 71392 | |Z| Probe, CSR-101, GSG/GS/SG | 100 to 300 | |
| 136643 | |Z| Probe, Calibration substrate in a silicon wafer |
More Product Information
Impedance Standard Substrates (ISSs) supports all of your high-frequency probing applications. Using them ensures greater accuracy and better repeatability in on-wafer calibration of vector network analyzers. Our ISSs offer the proven accuracy of LRRM calibrations with automatic load inductance compensation.
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Accommodates a combination of up to four Cascade Microtech probes
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Configurable for mixed-signal RF/mmW testing
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Quick and easy repairs to be performed in the field, by simply replacing individual probes
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Adaptable to new device layouts by exchanging individual probes
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Sample can be loaded or removed when the cryostat is cold
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High cooling power with sample in (He-3) liquid (400 mK with 400 microwatt cooling power)
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Sample probe and a load-lock with gate valve
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Infinity Probe: best for Al (Si)
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ACP Probe: best for AU (III-Vs)
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|Z| Probe: robust solution (long lifetime)
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RF chuck ±3 μm surface planarity
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Unique 500 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
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Exclusive 1-, 2-, 3-, and 4-port on-wafer calibration algorithms
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Automated calibration monitoring
See more Key Features on Specifications & Details tab
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Substrate material: High-resistivity silicon
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Substrate thickness: 275 µm
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Dielectric constant: 11.8
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Nominal Z0: 50 Ω
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Cryogen-free option available
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Flexible sample space
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Low noise, low vibration
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Long holding time
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Stable He-3 pot temperature
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On-wafer power device characterization up to 10,000 V DC / 600 A
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Safe and convenient integration kits to support T.I.P.S. “LuPo” High Voltage / High Power Probe Cards
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Prevent thin wafers from curling and breaking
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Safety interlock system with clear enclosure for operator safety during device measurements
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Convenient connection kits for easy and safe system integration with power device analyzers from Keysight Technologies and major suppliers
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Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
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Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
See more Key Features on Specifications & Details tab
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Highly stable granite base
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Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
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Re-configurable for DC, RF, mmW, FA, WLR and more
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Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
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Low-profile, straightforward design
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Easy and ergonomic operation
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Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
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Front or backside probing capability
See more Key Features on Specifications & Details tab
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Fully isolated experiment space for true 4K temperatures during probing
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Cryogenic positioners to provide large travel ranges without warming up the device
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Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
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A soft vacuum bellows provides a compliant mounting interface for the cryocooler
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Quick release vacuum feedthroughs for easy configurability
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A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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