FormFactor - Cascade CSR Cal Substrates - Perfectly matched to the |Z| Probe®
The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.
All CSR calibration substrates include the Open standard on the substrate itself, providing a more accurate calibration when compared to simply lifting the probes for Open. Since our probe systems are used in the laser-trimming process, the typical accuracy is better than 0.1% for all Load standards. Also, the resistance of the Load standard remains stable within 0.3% of the ideal value (50 Ω), over a temperature range from 10 to 430 K.
Finally, the design of the Line standard is optimized, resulting in accuracy of the characteristic impedance within 1.0% of the ideal value (50 Ω) for frequencies up to 110 GHz and beyond. For these reasons, the CSR family guarantees the best calibration, and thus the most accurate measurements.
Calibration Standard
Part Number | Description | Pitch (µm) | |
41702 | |Z| Probe, CSR-4, GSG | 250 to 500 | |
41704 | |Z| Probe, CSR-5, GS/SG | 250 to 500 | |
56407 | |Z| Probe, CSR-6, GS/SG | 50 to 250 | |
62025 | |Z| Probe, CSR-8, GSG | 100 to 250 | |
73319 | |Z| Probe, CSR-9, GSG | 50 to 150 | |
62563 | |Z| Probe, CSR-15, GSG | 500 to 1250 | |
69061 | |Z| Probe, CSR-16, GS/SG | 500 to 1250 | |
71391 | |Z| Probe, CSR-17, GSG | 1000 to 2500 | |
67074 | |Z| Probe, CSR-18, GS/SG | 1000 to 2500 | |
51077 | |Z| Probe, CSR-30, GSGSG | 100 | |
51078 | |Z| Probe, CSR-31, GSGSG | 150 | |
51079 | |Z| Probe, CSR-32, GSGSG | 200 | |
51080 | |Z| Probe, CSR-33, GSGSG | 250 | |
51081 | |Z| Probe, CSR-34, GSGSG | 500 | |
51082 | |Z| Probe, CSR-35, GSGSG | 125 | |
51874 | |Z| Probe, CSR-41, GSSG | 125 to 150 | |
51875 | |Z| Probe, CSR-43, GSSG | 200 to 250 | |
51876 | |Z| Probe, CSR-44, GSSG | 400 to 600 | |
52379 | |Z| Probe, CSR-40, GSSG | 100 | |
53527 | |Z| Probe, CSR-50, SGS | 100 | |
53528 | |Z| Probe, CSR-51, SGS | 125 to 150 | |
53529 | |Z| Probe, CSR-53, SGS | 200 to 250 | |
53530 | |Z| Probe, CSR-54, SGS | 400 to 500 | |
71392 | |Z| Probe, CSR-101, GSG/GS/SG | 100 to 300 | |
136643 | |Z| Probe, Calibration substrate in a silicon wafer |