FormFactor - Cascade CSR Cal Substrates - Perfectly matched to the |Z| Probe®
The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.
All CSR calibration substrates include the Open standard on the substrate itself, providing a more accurate calibration when compared to simply lifting the probes for Open. Since our probe systems are used in the laser-trimming process, the typical accuracy is better than 0.1% for all Load standards. Also, the resistance of the Load standard remains stable within 0.3% of the ideal value (50 Ω), over a temperature range from 10 to 430 K.
Finally, the design of the Line standard is optimized, resulting in accuracy of the characteristic impedance within 1.0% of the ideal value (50 Ω) for frequencies up to 110 GHz and beyond. For these reasons, the CSR family guarantees the best calibration, and thus the most accurate measurements.
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Calibration Standard
| Part Number | Description | Pitch (µm) | |
| 41702 | |Z| Probe, CSR-4, GSG | 250 to 500 | |
| 41704 | |Z| Probe, CSR-5, GS/SG | 250 to 500 | |
| 56407 | |Z| Probe, CSR-6, GS/SG | 50 to 250 | |
| 62025 | |Z| Probe, CSR-8, GSG | 100 to 250 | |
| 73319 | |Z| Probe, CSR-9, GSG | 50 to 150 | |
| 62563 | |Z| Probe, CSR-15, GSG | 500 to 1250 | |
| 69061 | |Z| Probe, CSR-16, GS/SG | 500 to 1250 | |
| 71391 | |Z| Probe, CSR-17, GSG | 1000 to 2500 | |
| 67074 | |Z| Probe, CSR-18, GS/SG | 1000 to 2500 | |
| 51077 | |Z| Probe, CSR-30, GSGSG | 100 | |
| 51078 | |Z| Probe, CSR-31, GSGSG | 150 | |
| 51079 | |Z| Probe, CSR-32, GSGSG | 200 | |
| 51080 | |Z| Probe, CSR-33, GSGSG | 250 | |
| 51081 | |Z| Probe, CSR-34, GSGSG | 500 | |
| 51082 | |Z| Probe, CSR-35, GSGSG | 125 | |
| 51874 | |Z| Probe, CSR-41, GSSG | 125 to 150 | |
| 51875 | |Z| Probe, CSR-43, GSSG | 200 to 250 | |
| 51876 | |Z| Probe, CSR-44, GSSG | 400 to 600 | |
| 52379 | |Z| Probe, CSR-40, GSSG | 100 | |
| 53527 | |Z| Probe, CSR-50, SGS | 100 | |
| 53528 | |Z| Probe, CSR-51, SGS | 125 to 150 | |
| 53529 | |Z| Probe, CSR-53, SGS | 200 to 250 | |
| 53530 | |Z| Probe, CSR-54, SGS | 400 to 500 | |
| 71392 | |Z| Probe, CSR-101, GSG/GS/SG | 100 to 300 | |
| 136643 | |Z| Probe, Calibration substrate in a silicon wafer |
More Product Information
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Multi-purpose SIGMA instrument integration kit
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Shorter cabling and universal chuck connection
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Triax probe with protected guard
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Triax design for low-leakage measurements up to 3 kV
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Special chuck surface coating
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High-isolation ready
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Arcing protection
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Shield Enclosure with interlock
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Advanced grounding concept
See more Key Features on Specifications & Details tab
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Combination of DC and RF in a single probe module: One dual probe or a maximum of three RF; a maximum of 9 DC standard (other quantities upon request).
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Utilizes ACP tip design, GSG, GS or SG
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RF tips available from DC to 110 GHz
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Choice of BeCu or tungsten tips
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DC power needles come standard with 100 pF microwave capacitor
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Power bypass inductance: 8 nH
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Maximum DC voltage: 50 V without power bypassing (25 V with standard power bypassing, and component dependent with custom power bypassing)
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Ideal for probing the entire circuit for functional test
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Dual ACP configuration supports differential signaling applications
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DC probes can provide power or slow logic to circuit under test
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Easy and fast setup of camera views
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Go to Light and Image Settings of the selected camera view with only one mouse click
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Guided workflows for wafer setups, alignment tools and Autonomous Assistants
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Workflow wizard shows task-relevant settings and options only
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Visualizes the progress of setup, alignment and measurement tasks
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Status information always at hand
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Informs the user about events, for example “Successful Alignment”
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Interacts with the user and helps with intelligent solutions
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For very complex wafer structures
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Enables automatic test of multiple devices in each die location before stepping to the next die
See more Key Features on Specifications & Details tab
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Full-radius, nickel-plated tungsten needles
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Power bypass inductance: 16 nH
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Supports collinear and non-standard needle configurations
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Support up to a maximum of 12 ceramic blades DC needles / contacts
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Ideal for probing the entire circuit for functional test
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DC probes can provide power or slow logic to circuit under test
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight SPA for On-wafer DC Parametric Measurements
Ultra Low Temperature
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Pulse tube cryocooler for cryogen free 4K temperatures
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He-3 sorption cooler for high power intercept and launch stage for ADR
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Single stage ADR provides solid state cooling down to 25mK
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Sample stage mounting at both 300mK and 30mK
Configurability
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Multiple stage feedthroughs for thermally intercepting the signals
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Two large electrical bread boards for more configurable space
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Rapid cool options for faster cooldowns
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Unique Air Coplanar tip design with choice of beryllium copper (BeCu) or tungsten tip material
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DC to 110 GHz models available in single and dual line versions
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Low insertion and return loss with ultra-low-loss ( -L ) versions
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Excellent crosstalk characteristics
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Wide operating temperature -65 ° C to + 200 ° C
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Wide range of pitches available, from 50 to 1250 µm
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Individually supported contacts
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Reduced contact (RC) probe tips for small pads
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BeCu tip provides rugged, repeatable contact on gold pads
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Low running costs, less vibration, less noise, reduced maintenance
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Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
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CMN calibrated thermometry on MC plate
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Operation via touch panel controller: Remote operation via ethernet interface
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Ideal for multiport RF/Microwave and high-speed digital signal testing
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Mix DC and RF/Microwave signals on one probe
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Long lifetime – typically over one million (1,000,000) touchdowns
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Excellent performance in temperatures ranging from 10 K to 200°C
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Probe on any pad material with no damage
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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