FormFactor - HPD Wet DR Series - Wet Dilution Refrigerator Systems
-
Proven technology: designed in conjunction with several top STM groups in the world
-
Quiet, low vibration operation
-
Low running costs and reduced maintenance
-
Easy operation and fast cool-down; load sample when the system is cold for TL models
-
Calibrated RuO and CMN thermometry read by model 372S resistance bridge are installed on the mixing chamber plate
FormFactor’s wet dilution refrigerators has two series of products: the Wet DR-50/250/500 and Wet DR-50-TL/250-TL/500-TL.
Both series of dilution refrigerators enable easy and cost-effective cooling to temperatures between 35 to 10 mK.
The sample of Wet DR-50/250/500 systems is located in a normal vacuum (HV) space. It can be loaded when the system is warm with the vacuum can open.
The TL series has been optimized for scanning tunneling microscopy (STM) applications. The sample can be loaded into the ultra-high vacuum (UHV) space from the top of the dilution refrigerator insert when the cryostat is cold.
Custom wiring is available.
Both fully automated and manually operated gas handling systems are available.
Document
More Product Information
-
Cryogen-free: cooling with two-stage pulse tube refrigerator (PTR)
-
Low vibration
-
Mechanical heat switch
-
Internal charcoal sorption pump
-
Different substrate carriers for wafers up to 150 mm or single dies
-
Up to six positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Ergonomic and straightforward design
-
Intuitive, manual operation
-
Independent control of linear chuck stage and positioners
-
Contact/separation stroke for probe platen
See more Key Features on Specifications & Details tab
-
Fully isolated experiment space for true 4K temperatures during probing
-
Cryogenic positioners to provide large travel ranges without warming up the device
-
Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
-
A soft vacuum bellows provides a compliant mounting interface for the cryocooler
-
Quick release vacuum feedthroughs for easy configurability
-
A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
-
Up to 12 contacts; any contact can be DC, Power, Logic to 500 MHz,or RF to 20 GHz
-
Online design configuration tool helps you to specify your probe in minutes
-
All designs are fully quadrant compatible
-
Full solution includes probes, calibration substrates, stations, accessories and software
-
Scalable architecture for future needs
-
Superior field confinement reduces unwanted couplings to nearby devices and transmission modes
-
Superior measurement accuracy and repeatability
-
Small scrub minimizes damage to aluminum pad
-
Typical contact resistance < 0. 05 Ω on Al, <0.02Ω on Au
-
Save valuable wafer space and reduce pad parasitics by being able to shrink pad geometries to 25 x 35 µ m (best case)
See more Key Features on Specifications & Details tab
-
High power – 66 W at 2.4 GHz and 43 W at 5 GHz
-
Extremely low insertion loss of ≤ 0.4 dB (typical) up to 40 GHz
-
Excellent contact control and low contact resistance
-
High performance on any pad material (Al or Au)
-
Longest lifetime – typically one million (1,000,000) touchdowns
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
Ultra Low Temperature
-
Pulse tube cryocooler for cryogen free 4K temperatures
-
He-3 sorption cooler for high power intercept and launch stage for ADR
-
Single stage ADR provides solid state cooling down to 25mK
-
Sample stage mounting at both 300mK and 30mK
Configurability
-
Multiple stage feedthroughs for thermally intercepting the signals
-
Two large electrical bread boards for more configurable space
-
Rapid cool options for faster cooldowns
-
Fully isolated experiment space for true 4K temperatures during probing
-
Cryogenic positioners to provide large travel ranges without warming up the device
-
Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
-
A soft vacuum bellows provides a compliant mounting interface for the cryocooler
-
Quick release vacuum feedthroughs for easy configurability
-
A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
Download Line Card
