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FormFactor - FRT Acquire Automation XT - Easy recipe creation, multi-sensor measurement or hybrid metrology

FormFactor - FRT Acquire Automation XT - Easy recipe creation, multi-sensor measurement or hybrid metrology

Full automation of 2D and 3D measurements Selection of numerous measuring tasks, filters, and evaluations according to SEMI and DIN-EN-ISO standards...
FormFactor - FRT Mark III – Measurement Analysis Software - Process, evaluate, and present 2D or 3D measurements

FormFactor - FRT Mark III – Measurement Analysis Software - Process, evaluate, and present 2D or 3D measurements

Analysis software for evaluation of surface and profile measurements Evaluation of SPM data and other numerous import formats Determination of surface...
FormFactor - FRT MicroProf® 100 - Multi-sensor metrology tool in a table-top unit

FormFactor - FRT MicroProf® 100 - Multi-sensor metrology tool in a table-top unit

Tabletop unit with robust housing Based on the established FRT multi-sensor technology TTV option for double-sided sample inspection possible...
FormFactor - FRT MicroProf® 200 - Universal, stand-alone metrology tool

FormFactor - FRT MicroProf® 200 - Universal, stand-alone metrology tool

Full range of multi-sensor setups usable Integrated camera with add-on illumination Control and measurement computer with TFT monitor...
FormFactor - FRT MicroProf® 300 - Powerful metrology tool for quality assurance, development and manufacturing

FormFactor - FRT MicroProf® 300 - Powerful metrology tool for quality assurance, development and manufacturing

Full range of multi-sensor setups usable Integrated camera with add-on illumination Control and measurement computer with TFT monitor...
FormFactor - FRT MicroProf® AP - Flexible multi-sensor metrology tool for advanced packaging

FormFactor - FRT MicroProf® AP - Flexible multi-sensor metrology tool for advanced packaging

Flexible multi-sensor metrology tool for advanced packaging For every process step from TSV etching, RDL/UBM/bumping to Cu nail reveal, dicing, stacking, and...
FormFactor - FRT MicroProf® DI - High-precision optical surface inspection for semiconductor applications

FormFactor - FRT MicroProf® DI - High-precision optical surface inspection for semiconductor applications

High-precision optical surface inspection for semiconductor applications Metrology and Inspection flexibly combined in one fully automated platform...
FormFactor - FRT MicroProf® FE - Fully automated metrology for front-end applications

FormFactor - FRT MicroProf® FE - Fully automated metrology for front-end applications

Fully automated 2D and 3D surface metrology for front-end applications Multi-sensor technology for hybrid metrology Specific inline solution for...
FormFactor - FRT MicroProf® FS - Multi-sensor technology and hybrid metrology for MEMS and foundries

FormFactor - FRT MicroProf® FS - Multi-sensor technology and hybrid metrology for MEMS and foundries

Fully automated multi-sensor technology and hybrid metrology setup for MEMS and Foundries Customizable for a wide range of applications within the Wafer Foundry...
FormFactor - FRT MicroProf® MHU - Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries

FormFactor - FRT MicroProf® MHU - Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries

Material Handling Unit with dual arm vacuum grabber Optional edge handling and/or non-contact handling Different wafer sizes (from 2 up to 8...
FormFactor - FRT MicroProf® TL - Optical metrology with programmable temperature control

FormFactor - FRT MicroProf® TL - Optical metrology with programmable temperature control

Optical surface metrology tool with fully integrated heating and cooling stage Programmable temperature control from 10°C to 400°C High...
FormFactor - SurfaceSens - Modular optical metrology set-up for hybrid surface process control

FormFactor - SurfaceSens - Modular optical metrology set-up for hybrid surface process control

FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT...