FormFactor - Cascade CM300xi-SiPh - 300 mm semi-/ fully-automated probe system with Autonomous Silicon Photonics Measurement Assistant
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Revolutionary technology advancement for wafer and die-level photonics probing
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Real-time in-situ calibrations
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Highest accuracy in test results
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Lowest coupling loss
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New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
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Minimized coupling losses with minimal trench dimensions
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Industry standard for vertical coupling to wafer-level grating couplers
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Dark, shielded and frost-free
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-40°C to +125°C
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Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
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Exclusive FormFactor-developed automated test methodology
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FormFactor-developed graphical user interface to manually control the optical positioning system
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Configurable between single fibers, fiber arrays and edge coupling holders
300 mm Probe Station with Integrated Silicon Photonics Wafer and Die-Level Probing Solution
The CM300xi-SiPh 300 mm probe station is the first verified integrated measurement solution on the market that enables engineering and production-proven, optimized optical measurements right after installation – without further development. This unique Autonomous SiPh Measurement Assistant provides a groundbreaking set of functions that precisely calibrate the optical positioning hardware to the probe station and verify the performance of the integrated system.
In combination with the revolutionary OptoVue for advanced calibrations, intelligent machine vision algorithms and the exclusive SiPh TopHat for dark, shielded and frost-free environment, the system enables true hands-free autonomous calibration and re-calibration at multiple temperatures. This enables faster time to more accurate measurements and reduced cost of test.
FormFactor’s exclusively developed SiPh-Tools and Photonics Controller Interface (PCI) provide powerful software tools for alignments, data collection and analysis. This includes all necessary algorithms for using fibers and fiber arrays with both surface and edge coupling applications.
FormFactor provides all the tools, fixtures and functionality needed to enable you to be performing silicon photonic probing on your photonic devices in days instead of months or years.
Applications
- Silicon Photonics
OptoVue
- Revolutionary technology advancement for wafer and die-level photonics probing
- Real-time in-situ calibrations
- Singulated die testing
- True die-level edge coupling
- In-situ power measurements
- Advanced calibration technologies
- Enables autonomous measurements
Horizontal Die-Level Edge Coupling
- Highest accuracy in test results
- Lowest coupling loss
- Repeatable measurement results due to exclusive automated fiber-to-facet alignment technology
- Reduced risk of damaging fibers with collision avoidance technology
- Ease of use for less experienced users
- Enables close simulation of real-world conditions with device performance closest to the final application
Wafer-Level Edge Coupling
- New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
- Minimized coupling losses with minimal trench dimensions
- Easy setup even for less experienced users
- Repeatable measurement results due to unique fiber-to-facet gap alignment technology
- Reduced risk of damaging fibers with collision avoidance technology
Vertical Coupling
- Industry standard for vertical coupling to wafer-level grating couplers
- Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
- Exclusive Pivot Point calibration determines the optimal point of minimal translation at the fiber/array tip
- Search First Light feature enables automated determination of initial position for optimization
- Other integrated features: Incident Angle Cal, Optical Rotation Scan, Optical Scan Data Analysis, Optical Tracking, Align Optical Probes
Thermal Capability
- Dark, shielded and frost-free
- -40°C to +125°C
- Only solution available that enables minimized air flow impact at cold temperatures to the fibers/fiber arrays for stable and repeatable measurement results
- Exclusive ITO-coated TopHat window for easy setup
- Enables hands-free autonomous calibration and re-calibration at multiple temperatures
Alliances Hold the Key to SiPh Test Solutions
- Strong Preferred Partnership with Keysight Technologies for measurement instrumentation
- Test Executive Automation with integration into Keysight Test Automation on Pathwave
- World class precision positioning as a Preferred Partner with Physik Instrumente (PI)
- Leveraging considerable expertise through an innovative engineering team
Exclusive Automated Calibrations
- Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
- Step-by-step wafer to probe height training
- CalVue utilizes uniquely designed retro-mirror technology to view all aspects of the fiber/array without external light and enables real-time in-situ automated calibrations
- Further exclusive calibration functions: motor calibration, z-displacement calibration, theta calibrations, pzt calibration, planarity calibrations, automatic pivot point calibration
Proven Performance
- Exclusive FormFactor-developed automated test methodology
- Demonstrates full performance of the positioning solution calibrated to the probe station by measuring the coupled power repeatability
- Verifies that the coupled power results across 900 measurements are within less than 0.3 dB
- In between each measurement, all solution elements are moved including the wafer chuck, hexapod stages and piezo stages
- Truly demonstrates the integrated performance and robustness of FormFactor’s Autonomous Silicon Photonics Measurement Assistant
FormFactor SiPh-Tools
- Powerful FormFactor-developed software package
- Includes a vast tool set for enabling and facilitating optical probing
- Automates manual tasks by integrating probe station machine vision capability with optical positioning and test equipment
- Features: Measurement Position Training, Wafer Training, Automated Alignment Functions, Calibration Wafer Verifications, Optical Alignment Verifications, Sub-Die Management
- Wide range of tools for capturing, logging and interpreting data
FormFactor Photonics Controller Interface (PCI)
- FormFactor-developed graphical user interface to manually control the optical positioning system
- Can also be used to setup scan parameter configurations and perform initial optical alignment functions
- Once aligned, all calibration functions are automated and performed through SiPh-Tools
Reconfigurable Fiber Arm
- Configurable between single fibers, fiber arrays and edge coupling holders
- Flexibility for engineering and volume environments
- After changing fiber holders, FormFactor’s automated calibration routines will have you back up and running in minutes
- Custom designed nanometer-accuracy integrated Z-Displacement sensor maximizes the testable area of the wafer and guarantees accurate and repeatable data collection
More Product Information

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Low insertion loss
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Low contact resistance
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Lithographically defined probe tip
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Nickel contacts


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Re-configurable for DC, RF, mmW, FA, WLR and more
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Thermal range: -60˚C to 300˚C available
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Upgrade path to meet your future needs
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Stable and repeatable measurements over a wide thermal range
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Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
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Advanced EMI-shielding with PureLine with AttoGuard technologies
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Best solution for low-noise and 1/f measurements
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Minimize AC and spectral noise
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Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
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Locking roll-out stage
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Innovative microscope remote control
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Intuitive ergonomic stage controls
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Quick, safe, and comfortable wafer access
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Easy on-wafer navigation
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Fast setup and test data gathering
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Dedicated Velox version for manual probe stations
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AugmentedAlign tool with on screen markers for improved RF measurement accuracy

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Quick and easy probe tip navigation
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Z drive can work in the same range as the chuck
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Enables higher separation gap while the DUT stays in focus
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Automatically configure and optimize performance
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24/7 operating
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Increased MTBF
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Protects the measurement setup
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Prevents involuntary mechanical contact between lens and probes

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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Independently cooled cold shield
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Probe positioners placed inside vacuum chamber
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Intuitive, manual drives
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Front loading capability through load door
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Independent control of linear chuck stage and positioners
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Contact/separation stroke for chuck

Customized Solutions for a Variety of Challenging Applications

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Continues the Infinity family’s Industry leading electrical performance
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High temperature capability (175° C +) for automotive device characterization and other applications
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Better tip visibility for enhanced placement accuracy and repeatability
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Improved tip life/durability with solid rhodium contacts
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New tip architecture enables support for narrower pitches (e.g. 25um)
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Advanced mechanical design combined with small contacts enables probing on smaller pads/pitches and improves durability and robustness

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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Joystick controller
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Manual probe positioners with rotary feed-throughs
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
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User-centered design minimizes training costs and enhances efficiency

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Infinity Probe: best for Al (Si)
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ACP Probe: best for AU (III-Vs)
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|Z| Probe: robust solution (long lifetime)
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RF chuck ±3 μm surface planarity
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Unique 500 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
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Exclusive 1-, 2-, 3-, and 4-port on-wafer calibration algorithms
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Automated calibration monitoring

FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement





