PureLine 3 Technology

• Provides an effectively noise free environment around the device under test (DUT)
• First automated probe station to achieve -190dB spectral noise*
• Up to 32x lower noise (1kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications
• Eliminates over 97% of the environmental noise experienced in previous probe systems
• Extensive collection of FormFactor patents, electrical design knowledge, and measurement system IP

Plug In and Go

• World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
• Eliminates all ground-loop induced TestCell noise
• Low field emissions
• Provides fully managed and filtered AC power to the entire system, prober and instruments

Autonomous 24/7 Operation

• Up to 4x faster flicker noise thermal testing on 30 μm pads
• ULN optimized motorized DC probe positioners enable fully Autonomous DC and low frequency flicker noise probing over multiple temperatures
• For complete hands-free 24/7 operation

Low Noise Site Survey

• Performed by a FormFactor factory trained engineer to determine the best location to install the ULN system
• Enables a good location to be selected that will limit unwanted environment noise from degrading the TestCell performance
• Significantly reduces setup costs and tool deployment time
• Includes precision measurements of four critical noise sources: floor vibrations ( µg over 0.1Hz to 1KHz range), magnetic field strength (AC milligauss), Power-Line Noise, and Power-Line THD (total harmonic distortion)

System Verification Service

• Included with every CM300xi-ULN probing system
• Demonstrates key specifications and performance tied to the standard product datasheet
• Key product specification parameters are measured such as Spectral Noise Density (dBVrms/√Hz, 1Hz to 20MHz), and AC chuck noise (mV p-p, DC to 2.5GHz)

ULN MicroChamber^TM

• Probing environment inside the prober and directly surrounding the DUT and wafer chuck area
• Ensures a complete EMI / RFI shielded area
• Provides dark and dry environment for measuring light sensitive transistors, and devices at negative temperatures (<= -60°C) with frost free operation

ULN Power Conditioning Unit

• Provides fully managed and filtered AC power to the entire system – prober and instruments
• Eliminates ground-loops between probe station and instruments that cause significant low frequency noise
• Supplies clean, filtered AC power to the probe station, thermal chiller and controller, wafer loader, powered accessories, and all test instruments
• Provides a unified Emergency Off / Emergency Power control system for safe operation of the whole system and all instruments.

ULN Thermal Filtering Module

• Filters harmful noise generated by external thermal control systems
• The active module significantly reduces high frequency noise by up to 30dB above 1Mhz

ULN Single Point Grounding Cabling System

• Integrated for all prober accessories
• Low resistance grounding connections
• Low resistance materials and hard connection schemes for mechanical assemblies
• Reduced “antenna effect” injection of unwanted RF noise into the measurement path

ULN SMU Filtering Modules for Accurate PLL Phase Noise

• Newly developed DC filter modules for Source Measure Units (SMU)
• For highly accurate phase noise measurements of devices such as Phase Lock Loop circuits (PLL) and Voltage Controlled Oscillators (VCO)
• Provide ultra-quiet / clean DC supply voltage
• Provide up to 100dB attenuation (50Hz to 80Mhz) with 100mA max DC current handling
• Each SMU filter module supports one channel, and multiple modules can be configured together to provide multi-channel clean power

Industry-Leading High Performance Probes

• Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
• Guarantees fully-guarded measurements to fA and fF levels
• Read more: DCP-HTR Probe and DCP 100 Series Probe

Easy manual wafer loading

• Chuck mounted on rollout stage that can be opened manually
• Enables full access to the chuck and the auxiliary sites
• For fast and safe manual loading and unloading of wafers

3D Manual Controls

• Virtual Platen Lift and XY knobs at front
• Intuitive, and precise movement of chuck in X, Y, and Z-direction
• Platen Lift enables extremely rapid and intuitive way in performing many alignment tasks like setting up the contact height

Velox Probe Station Control Software

• User-centered design minimizes training costs and enhances efficiency
• Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
• Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
• Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
• VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

Test Productivity and Material Handling Unit

• Test automation out-of-cassette for higher test cell efficiency for over-night/over-weekend operation
• Handles up to 25 wafers (200 or 300 mm)
• SEMI-standard cassette hot-swap capability
• Very compact fully-automated solution with low footprint