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Revolutionary technology advancement for wafer and die-level photonics probing
Real-time in-situ calibrations
Singulated die testing
True die-level edge coupling
In-situ power measurements
Advanced calibration technologies
Enables autonomous measurements

See "Specifications & Details" tab for more key features

Manufactured By: FormFactor, Inc.

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Flexible Silicon Photonics Probing Solution for Vertical and Edge Coupling

FormFactor’s Autonomous Silicon Photonics Measurement Assistant sets the industry-standard in wafer and die-level silicon photonics probing. This highly flexible solution provides a multitude of testing technologies from single fibers to arrays and from vertical coupling to edge coupling. With the new revolutionary OptoVue for advanced calibrations, intelligent machine vision algorithms and the exclusive SiPh TopHat for dark, shielded and frost-free environment, the system enables hands-free autonomous calibration and re-calibration at multiple temperatures. This enables faster time to more accurate measurements and reduced cost of test.

The use of single optical fibers and fiber arrays as probes to couple light into and out of a wafer for both surface and edge coupling creates many challenges that FormFactor manages through its Contact Intelligence technology. Unlike electrical testing, optical testing uses fibers and fiber arrays that do not contact their corresponding ‘pads’ known as grating couplers or facets on the wafer surface and edge, respectively. Instead, fibers need to be articulated relative to the couplers and facets to find the position of maximum optical power transfer.

Setting the initial position of the fiber or array tips relative to the gratings and facets and then optimizing their position is accomplished through unique automated techniques developed by FormFactor engineers. Using advanced image processing and specially developed algorithms, Z height setting, fiber-to-facet gap, as well as a suite of automated calibrations of the positioning solution to the probe station are available.

FormFactor has also implemented a Z displacement sensing technology that enables precise sub-micron level placement accuracy of the fibers and arrays when stepping die-to-die. These automated optical capabilities can also be combined with programmable DC and RF positioning technology to create a truly automated Optical-Optical, Optical-Electrical, and Optical-Electrical-Optical test platform.

For optical applications, Contact Intelligence reduces what used to take days, weeks or months to a matter of minutes while offering flexibility in a dynamic engineering environment and a stable repeatable environment for production.

>>>Explore Interactive Brochure

The Autonomous Silicon Photonics Measurement Assistant is available for the following 200 mm and 300 mm probe stations: CM300xi-SiPh and SUMMIT200.

Applications

Silicon Photonics

Horizontal Die-Level Edge Coupling

Highest accuracy in test results
Lowest coupling loss
Repeatable measurement results due to exclusive automated fiber-to-facet alignment technology
Reduced risk of damaging fibers with collision avoidance technology
Ease of use for less experienced users
Enables close simulation of real-world conditions with device performance closest to the final application

Wafer-Level Edge Coupling

New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
Minimized coupling losses with minimal trench dimensions
Easy setup even for less experienced users
Repeatable measurement results due to unique fiber-to-facet gap alignment technology
Reduced risk of damaging fibers with collision avoidance technology

Vertical Coupling

Industry standard for vertical coupling to wafer-level grating couplers
Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
Exclusive Pivot Point calibration determines the optimal point of minimal translation at the fiber/array tip
Search First Light feature enables automated determination of initial position for optimization
Other integrated features: Incident Angle Cal, Optical Rotation Scan, Optical Scan Data Analysis, Optical Tracking, Align Optical Probes

Thermal Capability

Dark, shielded and frost-free
-40°C to +125°C
Only solution available that enables minimized air flow impact at cold temperatures to the fibers/fiber arrays for stable and repeatable measurement results
Exclusive ITO-coated TopHat window for easy setup
Enables hands-free autonomous calibration and re-calibration at multiple temperatures

Alliances Hold the Key to SiPh Test Solutions

Strong Preferred Partnership with Keysight Technologies for measurement instrumentation
Test Executive Automation with integration into Keysight Test Automation on Pathwave
World class precision positioning as a Preferred Partner with Physik Instrumente (PI)
Leveraging considerable expertise through an innovative engineering team

Exclusive Automated Calibrations

Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
Step-by-step wafer to probe height training
CalVue utilizes uniquely designed retro-mirror technology to view all aspects of the fiber/array without external light and enables real-time in-situ automated calibrations
Further exclusive calibration functions: motor calibration, z-displacement calibration, theta calibrations, pzt calibration, planarity calibrations, automatic pivot point calibration

Proven Performance

Exclusive FormFactor-developed automated test methodology
Demonstrates full performance of the positioning solution calibrated to the probe station by measuring the coupled power repeatability
Verifies that the coupled power results across 900 measurements are within less than 0.3 dB
In between each measurement, all solution elements are moved including the wafer chuck, hexapod stages and piezo stages
Truly demonstrates the integrated performance and robustness of FormFactor’s Autonomous Silicon Photonics Measurement Assistant

FormFactor SiPh-Tools

Powerful FormFactor-developed software package
Includes a vast tool set for enabling and facilitating optical probing
Automates manual tasks by integrating probe station machine vision capability with optical positioning and test equipment
Features: Measurement Position Training, Wafer Training, Automated Alignment Functions, Calibration Wafer Verifications, Optical Alignment Verifications, Sub-Die Management
Wide range of tools for capturing, logging and interpreting data

FormFactor Photonics Controller Interface (PCI)

FormFactor-developed graphical user interface to manually control the optical positioning system
Can also be used to setup scan parameter configurations and perform initial optical alignment functions
Once aligned, all calibration functions are automated and performed through SiPh-Tools

Reconfigurable Fiber Arm

Configurable between single fibers, fiber arrays and edge coupling holders
Flexibility for engineering and volume environments
After changing fiber holders, FormFactor’s automated calibration routines will have you back up and running in minutes
Custom designed nanometer-accuracy integrated Z-Displacement sensor maximizes the testable area of the wafer and guarantees accurate and repeatable data collection

FormFactor Autonomous SiPh Measurement Assistant Brochure.pdf

FormFactor Autonomous SiPh Measurements Brief.pdf

FormFactor CM300xi-SiPh Data Sheet.pdf

FormFactor Test Setup Optimization and Automation for Accurate Silicon Photonics Wafer Acceptance Production Tests.pdf

FormFactor Probe Positioners Brochure.pdf

FormFactor Cascade Probe Systems Brochure.pdf

FormFactor Probe Station Accessories Catalog.pdf

FormFactor Global Services Brochure (Cascade Probe Systems).pdf

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