FormFactor - Cascade Multiline TRL Cal Substrates - Multiline TRL substrates for T-Wave probes
-
Substrate material: High-resistivity silicon
-
Substrate thickness: 275 µm
-
Dielectric constant: 11.8
-
Nominal Z0: 50 Ω
Millimeter- and submillimeter-wave calibration substrates, optimized for T-Wave™ probes. The multiline TRL calibration substrates offer CPW standards including reflect (short), thru and two lines and are recommended to use with WinCal XE™ calibration software. Some off-set short and off-set open structures are included for additional measurements.
Impedance Standard Substrate Maps
| Part Number | Description | Pitch (μm) |
|
Multi-line TRL Substrate, WR1.0, WR2.2, WR3.4, WR4.3, WR5.1 |
25 | |
| Multi-line TRL Substrate, WR2.2, WR3.4, WR4.3, WR5.1 | 50 | |
| Multi-line TRL Substrate, WR3.4, WR4.3, WR5.1 | 75 and 100 |
More Product Information
-
Up to 12 contacts; any contact can be DC, Power, Logic to 500 MHz,or RF to 20 GHz
-
Online design configuration tool helps you to specify your probe in minutes
-
All designs are fully quadrant compatible
-
Full solution includes probes, calibration substrates, stations, accessories and software
-
Scalable architecture for future needs
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
-
Cryogen-free: cooling with two-stage pulse tube refrigerator (PTR)
-
Low vibration
-
Mechanical heat switch
-
Internal charcoal sorption pump
-
Low running costs, less vibration, less noise, reduced maintenance
-
Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
-
CMN calibrated thermometry on MC plate
-
Operation via touch panel controller: Remote operation via ethernet interface
-
Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
-
Re-configurable and upgradable as requirements grow
-
Minimizes setup times with no loss in performance or accuracy
-
Seamless integration of various measurement instruments
-
Solid station frame
-
Built-in vibration-isolation solution for superior vibration attenuation
-
Rigid microscope bridge
-
Compact and rigid mechanical design
-
Highly accurate measurement results
-
Incorporates best-known methods
-
Ergonomic and straightforward design for comfortable and easy operation
-
Low-profile design
-
Simple microscope operation
-
Quick and ergonomic change of DUT through pull-out stage
-
Minimize training efforts
-
Fast time to data
-
Convenient operation
-
Highly stable granite base
-
Independent, coarse movement of X and Y axes, combined with easy fine adjustments
-
Re-configurable for DC, RF, mmW, FA, WLR and more
-
Full thermal range of -60°C to +300°C
-
Low-profile, straightforward design
-
Spacious top chambers for up to 12 positioners
-
Reduces electrical noise by providing a fully electromagnetically shielded, ultra-low-noise, light-tight environment
-
Enables accurate low-noise measurements of atto amperes, femtofarads and microvolts at temperatures down to -60°C
See more Key Features on Specifications & Details tab
-
Different substrate carriers for wafers up to 100 mm or single dies
-
Up to six positioners
-
Independently cooled cold shield
-
Probe positioners placed inside vacuum chamber
-
Ergonomic and straightforward design
-
Simple microscope operation
-
Independent control of linear chuck stage and positioners
-
Contact/separation stroke for probe platen
See more Key Features on Specifications & Details tab
-
Unique Air Coplanar tip design with choice of beryllium copper (BeCu) or tungsten tip material
-
DC to 110 GHz models available in single and dual line versions
-
Low insertion and return loss with ultra-low-loss ( -L ) versions
-
Excellent crosstalk characteristics
-
Wide operating temperature -65 ° C to + 200 ° C
-
Wide range of pitches available, from 50 to 1250 µm
-
Individually supported contacts
-
Reduced contact (RC) probe tips for small pads
-
BeCu tip provides rugged, repeatable contact on gold pads
-
Ease of use – Less experienced operators can perform DC measurements by simply pushing a button. This reduces the need of experienced users full time on each system.
-
Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
-
Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
Download Line Card
