FormFactor - HPD Kilimanjaro 1260 - Chip-scale semi-automated 4K probe station with large experiment space and vibration isolation
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Fully isolated experiment space for true 4K temperatures during probing
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Cryogenic positioners to provide large travel ranges without warming up the device
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Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
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A soft vacuum bellows provides a compliant mounting interface for the cryocooler
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Quick release vacuum feedthroughs for easy configurability
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A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
Large Ultra Low Vibration Chip-scale Probe Station for Conducting High-Accuracy Measurements at True 4K Cryogenic Temperatures
The HPD Kilimanjaro 1260 is a superior 4K solution to meet all your probing needs in an ergonomic low vibration system. Like the Kilimanjaro 125, this system addresses problems such as long turnaround times, high noise, and low signal capabilities. FormFactor’s superior knowledge of probing solutions and cryogenic systems puts us in the best position to help you meet your goals.
In addition to the applications that the Kilimanjaro 125 supports. The larger experimental volume enables larger 4K applications like scanning microscopy. The Kilimanjaro 1260 was used to deploy the Scanning SQUID Microscope (SSM).
This system employs a range of thermal isolation techniques to take full advantage of all the cooling power available. Using the same design as the Kilimanjaro 122 we achieve a true 4K system with a temperature stability 5mK.
Mechanical vibration is also a major issue for probing applications. Large displacements can cause damage to the sample and induce noise into the measurement. Triboelectric noise is also induced into the signals when mechanical vibrations travel through the cables. Utilizing the same methods of the Kilimanjaro 125, this system achieves a probe to DUT displacement of less than 50nm RMS.
Designed with customization in mind and with a larger stage design, the Kilimanjaro 1260 provides more configurable ports to get your signals to your sample. There are multiple easily accessible vacuum feedthroughs, and many light blocking ports in each stage plate. This approach makes it simple to address whatever signal (DC, RF, FO) capabilities you may need.
The HPD Kilimanjaro 1260 offers true 4K measurement during all probing operations in an ultra low vibe system. It is a robust and reliable system, which offers a broad array of optional features. Multiple upgrade paths ensure this system will fulfill many future needs.
Applications: Photonic QC, Spin QC, Cryo-CMOS, Scanning Microscopy
Cryogenic Temperatures
- Fully isolated experiment space for true 4K temperatures during probing
- Cryogenic positioners to provide large travel ranges without warming up the device
- Integrated helium pot for high temperature stability of the device under test
- Fully dry cryogen-free cooler eliminates the need for expensive helium circulation systems
- Rapid cool liquid nitrogen option for faster cool down times
Low Vibration
- Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
- A soft vacuum bellows provides a compliant mounting interface for the cryocooler
- Rigid support tube to direct vibrations from the cryocooler away from the sample
Configurability
- Quick release vacuum feedthroughs for easy configurability
- A large rectangular port for high signal capacity
- Multiple stage feedthroughs for thermally intercepting the signals
- Large experimental space provides more workroom and configurable ports
- Many available system options and add ons to choose from
More Product Information
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Highly stable granite base
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Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
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Re-configurable for DC, RF, mmW, FA, WLR and more
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Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
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Low-profile, straightforward design
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Easy and ergonomic operation
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Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
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Front or backside probing capability
See more Key Features on Specifications & Details tab
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Probe station
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Keysight Streamline Vector Network Analyzer (option up to 53 GHz)
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Choice of probes
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Known measurement accuracy traced back to independent standards
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Uses best measurement practices for optimized measurements
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Best in class RF and Microwave performance
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Small benchtop footprint
See more Key Features on Specifications & Details tab
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Quick and easy probe tip navigation
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Z drive can work in the same range as the chuck
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Enables higher separation gap while the DUT stays in focus
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Automatically configure and optimize performance
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24/7 operating
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Increased MTBF
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Protects the measurement setup
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Prevents involuntary mechanical contact between lens and probes
See more Key Features in Specifications & Features tab
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Low running costs, less vibration, less noise, reduced maintenance
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Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
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CMN calibrated thermometry on MC plate
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Operation via touch panel controller: Remote operation via ethernet interface
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Power bypass inductance: 8 nH
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Standard DCQ probes have flat tip needles available in nickel-plated tungsten or BeCu with diameters of 0.75 mil, 1.0 mil and 1.5 mil.
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Supports collinear and non-standard needle configurations
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Up to 16 DC for standard; maximum of 24 DC for custom
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Ideal for probing the entire circuit for functional test
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DC probes can provide power or slow logic to circuit under test
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Different substrate carriers for wafers up to 100 mm or single dies
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Up to six positioners
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Independently cooled cold shield
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Probe positioners placed inside vacuum chamber
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Ergonomic and straightforward design
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Simple microscope operation
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Independent control of linear chuck stage and positioners
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Contact/separation stroke for probe platen
See more Key Features on Specifications & Details tab
The LWP series Lightwave Probe enables optical measurements for on-wafer and hybrid photonics devices. It features user replaceable fiber pigtails allowing the probe to be optimized for a variety of light delivery and light collection applications including the characterization of topside illuminated photodiodes, Vertical Cavity Surface Emitting Lasers (VCSELs), hybrid transmitters and receivers, and LEDs.
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Fully isolated experiment space for true 4K temperatures during probing
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Cryogenic positioners to provide large travel ranges without warming up the device
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Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
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A soft vacuum bellows provides a compliant mounting interface for the cryocooler
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Quick release vacuum feedthroughs for easy configurability
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A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
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Ease of use – Less experienced operators can perform DC measurements by simply pushing a button. This reduces the need of experienced users full time on each system.
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Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
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Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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