FormFactor - Cascade IMS-K-DC - Integrated system with Keysight SPA for DC parametric measurements
Industry’s Most Productive and Accurate DC Parametric Measurement System
DC parametric measurements are important contributors to decisions made at each stage of semiconductor product development and production, for nearly every device type and semiconductor technology. They play a key role in advanced materials research, process characterization, device characterization and modeling, design debug, process monitoring, and production wafer sort. Accurate and repeatable DC parametric measurements (IV, CV, pulsed, and high-power) reduce uncertainty. Trustworthy results accelerate device qualification and produce more precise models and design toolkits. In turn, these allow designers to deliver more competitive products to market faster. We’ve revolutionized the analytical probe system for exactly this purpose – to provide an electrically pristine environment for on-wafer measurements. By eliminating environmental factors which can corrupt test results, the prober becomes effectively “invisible” to the measurement instrument. Since the first MicroChamber® probe station in 1991, FormFactor’s Cascade probe system products have always had the same mission – enabling customers to succeed by making the best decisions with the best data. Tightly integrated instrumentation from industry leader Keysight completes the system to deliver best possible measurement accuracy and repeatability.
Fastest, Safest, and Most Affordable Path to High Quality Measurements
Pre-validated, turn-key, comprehensive, integrated measurement systems from FormFactor deliver peace of mind and immediate, out-of-the-box productivity for important test applications.
These benefits are provided at no extra cost. IMS solutions from FormFactor include no markups over Keysight pricing or integration charges.
Only one device characterization system in the world is built upon the foundations of the #1 leader in R&D instrumentation plus the #1 leader in analytical probe systems – the FormFactor IMS-K-DC.
Applications
- DC Parametric Measurements
FormFactor and partner Keysight applications experts will help you configure a robust, complete solution, including:
- FormFactor probe system: CM300xi, SUMMIT200, MPS150 (others available)
- Manual, semi-automatic and fully automatic probes station options
- FormFactor analytical probes: DCP probes (others available) on manual or motorized positioners
- FormFactor DC automation software: Autonomous DC Measurement Assistant for unattended probing over temperature on small pads
- Full over temperature measurements and automation from -60°C to +300°C
- Keysight semiconductor parameter analyzer and/or PXIe SMUs: B1500A (others available)
- Keysight automation and modeling software: WaferPro XP, PathWave, IC-CAP
- To complete the system: cables, adapters, mounting hardware, etc.
More Product Information

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Substrate material: High-resistivity silicon
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Substrate thickness: 275 µm
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Dielectric constant: 11.8
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Nominal Z0: 50 Ω

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Provides an effectively noise free environment around the device under test (DUT)
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World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
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Up to 4x faster flicker noise thermal testing on 30 μm pads
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Provides dark and dry environment for measuring light sensitive transistors, and devices at negative temperatures (<= -60°C) with frost free operation
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Provides fully managed and filtered AC power to the entire system – prober and instruments
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Filters harmful noise generated by external thermal control systems
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Reduced “antenna effect” injection of unwanted RF noise into the measurement path
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Provide up to 100dB attenuation (50Hz to 80Mhz) with 100mA max DC current handling
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Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
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Enables full access to the chuck and the auxiliary sites
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Intuitive, and precise movement of chuck in X, Y, and Z-direction
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User-centered design minimizes training costs and enhances efficiency
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Test automation out-of-cassette for higher test cell efficiency for over-night/over-weekend operation

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Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
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Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
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Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
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Durable probe structure ensures more than 250,000 contacts
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Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications

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Revolutionary technology advancement for wafer and die-level photonics probing
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Highest accuracy in test results
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New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
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Minimized coupling losses with minimal trench dimensions
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Industry standard for vertical coupling to wafer-level grating couplers
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Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
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Dark, shielded and frost-free
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-40°C to +125°C
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Leveraging considerable expertise through an innovative engineering team
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Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
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Exclusive FormFactor-developed automated test methodology
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Automates manual tasks by integrating probe station machine vision capability with optical positioning and test equipment
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FormFactor-developed graphical user interface to manually control the optical positioning system
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Configurable between single fibers, fiber arrays and edge coupling holders

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Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
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Enables up to 5x faster time to accurate data
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Advanced 4-axis semi-automatic stage for accurate positioning and repeatable probe-to-pad contact
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RF/microwave device characterization, 1/f, WLR, FA and design debug
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Wide range of extremly performant, reliable thermal chuck systems from ATT
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Easy on-screen navigation, wafer mapping, and operation of accessories and thermal systems with Velox
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User-centered design minimizes training costs and enhances efficiency

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Cryogen-free option available
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Flexible sample space
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Low noise, low vibration
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Long holding time
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Stable He-3 pot temperature

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Can help to stabilize oscillations in high-gain devices
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Impedance match to low dynamic resistance laser diodes
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Custom configured for your application

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Combination of DC and RF in a single probe module: One dual probe or a maximum of three RF; a maximum of 9 DC standard (other quantities upon request).
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Utilizes ACP tip design, GSG, GS or SG
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RF tips available from DC to 110 GHz
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Choice of BeCu or tungsten tips
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DC power needles come standard with 100 pF microwave capacitor
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Power bypass inductance: 8 nH
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Maximum DC voltage: 50 V without power bypassing (25 V with standard power bypassing, and component dependent with custom power bypassing)
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Ideal for probing the entire circuit for functional test
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Dual ACP configuration supports differential signaling applications
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DC probes can provide power or slow logic to circuit under test

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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Independently cooled cold shield
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Probe positioners placed inside vacuum chamber
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Intuitive, manual drives
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Front loading capability through load door
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Independent control of linear chuck stage and positioners
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Contact/separation stroke for chuck

FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
