FormFactor - Cascade T-Wave Probe - Wafer-level electrical measurement of mmW devices and materials up to 1.1 THz
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Low insertion loss
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Low contact resistance
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Lithographically defined probe tip
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Nickel contacts
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T-Wave Probes set the industry performance standard for on-wafer measurements of millimeter and submillimeter wavelength devices. T-Wave Probes include both waveguide banded probes and broadband (dual band) probes.
T-Wave Waveguide Banded Probes
- Low insertion loss
- Low contact resistance
- 140 GHz – 1.1 THz versions
- Probe pitch as narrow as 25 μm
- Lithographically-defined probe tip
- Nickel contacts
T-Wave Broadband (Dual Band) Probes
- kHz to 170 GHz and kHz to 220 GHz versions available
- Low insertion loss
- Low contact resistance
- On Probe Integrated diplexer for integrating the coax and Wave Guide bands
- Probe pitch as narrow as 50 μm
- Lithographically defined probe tip
- Nickel contacts
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Exclusively available for use with the following system setup:
- FormFactor Probe systems using RFA probe arms with 45° dual frequency extender mounts
- Keysight 5291A VNA with integral 220 GHz single sweep capability
- Plus the Keysight M4 heads pared with the VDI Mini extended range frequency extenders
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More Product Information
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Multi-purpose SIGMA instrument integration kit
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Shorter cabling and universal chuck connection
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Triax probe with protected guard
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Triax design for low-leakage measurements up to 3 kV
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Special chuck surface coating
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High-isolation ready
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Arcing protection
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Shield Enclosure with interlock
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Advanced grounding concept
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Coaxial cable assembly suitable for fixed wiring inside and between equipment used in the microwave band up to 100GHz (continuous operating temperature range: -30 to +85°C).
These cables have excellent formability (shape-retention capability) that make wiring work easy and exhibit superior loss characteristics compared to semi-rigid cables. Standard connectors are SMA (m) straight connectors, although other connectors can be used as required.
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Easy and fast setup of camera views
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Go to Light and Image Settings of the selected camera view with only one mouse click
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Guided workflows for wafer setups, alignment tools and Autonomous Assistants
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Workflow wizard shows task-relevant settings and options only
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Visualizes the progress of setup, alignment and measurement tasks
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Status information always at hand
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Informs the user about events, for example “Successful Alignment”
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Interacts with the user and helps with intelligent solutions
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For very complex wafer structures
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Enables automatic test of multiple devices in each die location before stepping to the next die
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1.85 mm (V) DC to 67 GHz connectors from Southwest Microwave include field-replaceable 2- and 4-hole Flange-mount and standard or metric Thread-in Connectors, Direct-solder Cable Connectors, clamp-on End Launch Connectors, and the new Solderless Vertical Launch Connector.
AR’s microwave amplifiers are just as tough and dependable as our RF amplifiers, and they are backed by the same comprehensive warranty. Our microwave amplifiers offer the hard-to-find combinations of power and bandwidth in frequency increments and power output you need for today’s test applications.
An impedance tuner is an apparatus, which generates controllable reflection factor (Impedance) over a certain frequency range. Focus uses two basic technologies:
a) For frequencies from 100MHz to 110GHz (and above) we use the slide screw technique (models Multi Harmonic MPT, wideband (fundamental) CCMT, harmonic rejection PHT), in which a reflective probe (slug) is inserted into the slot of a low loss slotted transmission line (slabline or waveguide).
b) For frequencies from below 10MHz to 170MHz we use a lumped element technology (models LFT), whereby variable capacitors are connected with optimized lengths of coaxial cable.
Our 2 Series cable assembly showcases excellent phase stability against bending, developed with microwave/mmWave measurement environments in mind.
Its flexibility means low repulsion, reducing the load on the measured object
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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Joystick controller
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Manual probe positioners with rotary feed-throughs
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
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User-centered design minimizes training costs and enhances efficiency
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Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
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Enables up to 5x faster time to accurate data
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Advanced 4-axis semi-automatic stage for accurate positioning and repeatable probe-to-pad contact
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RF/microwave device characterization, 1/f, WLR, FA and design debug
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Wide range of extremly performant, reliable thermal chuck systems from ATT
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Easy on-screen navigation, wafer mapping, and operation of accessories and thermal systems with Velox
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User-centered design minimizes training costs and enhances efficiency
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FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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