FormFactor - Cascade DCP-HTR Series Probe - High-performance DC parametric probe
-
Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
-
Guarantees fully-guarded measurements to fA and fF levels
-
Individual connectors provide force-sense connection for quasi-Kelvin and CV measurements
-
Allows probing of different pad materials and sizes
-
Fast replacement of worn probes without the need for tools
The DCP-HTR probe delivers fA-level measurement capability from -65 °C to 300 °C for advanced characterization and reliability testing. Its unique design offers superior guarding and shielding over-temperature, overcoming the high-temperature performance limitations of standard coaxial needles. When used on a probe station with a MicroChamber, the DCP-HTR allows full utilization of semiconductor parametric test instruments. The optional probe tips with small diameter are ideal for probing pads as small as 30 x 30 μm.
Document
More Product Information
-
Different substrate carriers for wafers up to 100 mm or single dies
-
Up to six positioners
-
Independently cooled cold shield
-
Probe positioners placed inside vacuum chamber
-
Ergonomic and straightforward design
-
Simple microscope operation
-
Independent control of linear chuck stage and positioners
-
Contact/separation stroke for probe platen
See more Key Features on Specifications & Details tab
-
Load-lock chamber: Cycle devices 10X faster in a cryogenic environment
-
High-density electrical interface at cryogenic temperatures: More pins on the device enables more test structures to be probed with a single cooldown
-
Base temperature of < 2K or < 4K with high cooling power: Test devices at the temperatures that matter most for pre- screening and evaluating device performance
-
Low vibration: Stable contact with the device under test and enables low noise measurements
-
Substrate material: High-resistivity silicon
-
Substrate thickness: 275 µm
-
Dielectric constant: 11.8
-
Nominal Z0: 50 Ω
-
Ease of use – Less experienced operators can perform an RF calibration up to 500 GHz by simply pushing a button. This reduces the need of experienced users full time on each system.
-
Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
-
Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
-
Calibration Monitor and Re-calibration – System will
continuously monitor calibration drift, and automatically re-calibrate the system should the drift exceed a predefined limit.
-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Joystick controller
-
Manual probe positioners with rotary feed-throughs
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer
-
User-centered design minimizes training costs and enhances efficiency
See more Key Features on Specifications & Details tab
-
Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
-
Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
-
Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
-
Durable probe structure ensures more than 250,000 contacts
-
Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications
-
Highly stable granite base
-
Independent, coarse movement of X and Y axes, combined with easy fine adjustments
-
Re-configurable for DC, RF, mmW, FA, WLR and more
-
Full thermal range of -60°C to +300°C
-
Low-profile, straightforward design
-
Spacious top chambers for up to 12 positioners
-
Reduces electrical noise by providing a fully electromagnetically shielded, ultra-low-noise, light-tight environment
-
Enables accurate low-noise measurements of atto amperes, femtofarads and microvolts at temperatures down to -60°C
See more Key Features on Specifications & Details tab
-
Probe station
-
Keysight Streamline Vector Network Analyzer (option up to 53 GHz)
-
Choice of probes
-
Known measurement accuracy traced back to independent standards
-
Uses best measurement practices for optimized measurements
-
Best in class RF and Microwave performance
-
Small benchtop footprint
See more Key Features on Specifications & Details tab
-
Coaxial and triaxial measurements up to 10,000 V
-
High-quality construction with low-noise electrical performance
-
Replaceable probe tips in a variety of tip sizes
-
Temperature range of -60°C to 300°C
-
Triaxial measurement ensures a much better understanding of device leakage in the off state
-
Highly reliable, stable and repeatable measurements
-
Integrally designed as part of a complete measurement solution
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
Download Line Card
