• Probe station
• Keysight Streamline Vector Network Analyzer (option up to 53 GHz)
• Choice of probes
• Known measurement accuracy traced back to independent standards
• Uses best measurement practices for optimized measurements
• Best in class RF and Microwave performance
• Small benchtop footprint

• Load-lock chamber: Cycle devices 10X faster in a cryogenic environment
• High-density electrical interface at cryogenic temperatures: More pins on the device enables more test structures to be probed with a single cooldown
• Base temperature of < 2K or < 4K with high cooling power: Test devices at the temperatures that matter most for pre- screening and evaluating device performance
• Low vibration: Stable contact with the device under test and enables low noise measurements

• Best price per contact – typically over one million (1,000,000) touchdowns
• RF/Microwave signal is shielded and completely air isolated in the probe body
• Excellent performance in vacuum environments and temperatures as low as 4 K, or as high as 300°C
• Highest impedance control with perfectly-symmetrical, MEMS-machined coplanar contact structure
• Probe on any pad material with minimal damage

• Multi-purpose SIGMA instrument integration kit
• Shorter cabling and universal chuck connection
• Triax probe with protected guard
• Triax design for low-leakage measurements up to 3 kV
• Special chuck surface coating
• High-isolation ready
• Arcing protection
• Shield Enclosure with interlock
• Advanced grounding concept

• Different substrate carriers for wafers up to 200 mm or single dies
• Probe cards and/or up to eight positioners
• Independently cooled cold shield
• Probe positioners placed inside vacuum chamber
• Intuitive, manual drives
• Front loading capability through load door
• Independent control of linear chuck stage and positioners
• Contact/separation stroke for chuck

The low frequency tuners are a unique product technology using MPT algorithms for low frequency wideband tuning. Three or more cascaded tuning sections use series transmission cables and parallel rotary capacitors.

The length of the cables and number of tuning sections are optimized for maximum tuning range over a given bandwidth. HLFT tuners use 6 tuning sections allowing second harmonic frequency tuning.

• Quick and easy probe tip navigation
• Z drive can work in the same range as the chuck
• Enables higher separation gap while the DUT stays in focus
• Automatically configure and optimize performance
• 24/7 operating
• Increased MTBF
• Protects the measurement setup
• Prevents involuntary mechanical contact between lens and probes

• Fully isolated experiment space for true 4K temperatures during probing
• Cryogenic positioners to provide large travel ranges without warming up the device
• Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
• A soft vacuum bellows provides a compliant mounting interface for the cryocooler
• Quick release vacuum feedthroughs for easy configurability
• A large rectangular port for high signal capacity