The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.

• Application flexibility: Coax, Triax, RF/mmW, High Power, Double Sided
• Temperatures range from -60°C to +300°C
• Up to 25% lower air consumption (CDA) than other systems on the market with no compromise in transition times
• Low Thermal Resistance Technology
• MultiSense with multiple temperature sensors
• Isolated from ground
• Includes a jack for grounding and biasing
• Advanced wafer vacuum system for warped/partial thin wafers
• Provides uniform vacuum across the entire wafer surface
• Advanced shielding technology

• Re-configurable for DC, RF, mmW, FA, WLR and more
• Thermal range: -60˚C to 300˚C available
• Upgrade path to meet your future needs
• Stable and repeatable measurements over a wide thermal range
• Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
• Advanced EMI-shielding with PureLine with AttoGuard technologies
• Best solution for low-noise and 1/f measurements
• Minimize AC and spectral noise
• Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
• Locking roll-out stage
• Innovative microscope remote control
• Intuitive ergonomic stage controls
• Quick, safe, and comfortable wafer access
• Easy on-wafer navigation
• Fast setup and test data gathering
• Dedicated Velox version for manual probe stations
• AugmentedAlign tool with on screen markers for improved RF measurement accuracy

• Continues the Infinity family’s Industry leading electrical performance
• High temperature capability (175° C +) for automotive device characterization and other applications
• Better tip visibility for enhanced placement accuracy and repeatability
• Improved tip life/durability with solid rhodium contacts
• New tip architecture enables support for narrower pitches (e.g. 25um)
• Advanced mechanical design combined with small contacts enables probing on smaller pads/pitches and improves durability and robustness

• Functional temperature range of -263 to +150°C
• Stainless steel tip material for thermal decoupling
• Coaxial cable with TCE matched inner and outer conductors
• Consistent tip geometry even at cryogenic temperatures

• Different substrate carriers for wafers up to 150 mm or single dies
• Up to six positioners
• Probe positioners placed inside vacuum chamber
• Short and stable probe arms
• Ergonomic and straightforward design
• Intuitive, manual operation
• Independent control of linear chuck stage and positioners
• Contact/separation stroke for probe platen

• Long holding time: 80 hours with 10 STP liter He-3 gas
• Stable He-3 pot temperature: Separate sippers for 1K pot and the charcoal sorb cooling line
• Sample can be loaded or removed when the cryostat is cold
• Low noise, low vibration
• Multiple operation modes: He-3 cryostat can be operated without pumping the 1K pot (referred to as 4K operation mode)

• Accommodates a combination of up to four Cascade Microtech probes
• Configurable for mixed-signal RF/mmW testing
• Quick and easy repairs to be performed in the field, by simply replacing individual probes
• Adaptable to new device layouts by exchanging individual probes