Flexibility

• Different substrate carriers for wafers up to 100 mm or single dies
• Up to six positioners
• Use with liquid nitrogen or helium, depending on the target temperature
• Probing with an open chamber lid possible under atmospheric condition
• Specially designed for laboratory environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

See "Specifications & Details" tab for more key features

• Designed for use with specific Probe Systems
• Tables to suit all facility requirements and applications
• Stable probing, even in submicron range
• Granite platen ensures rigidity and temperature stability
• Can be combined with the Shield Enclosures

• Light-tight version and EMI-shielded version for low noise and light-sensitive measurements
• Application flexibility, ideal for use in high frequency applications
• Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system
• Suitable for integration with vibration isolating tables

Floating Action Buttons

• Easy and fast setup of camera views
• Go to Light and Image Settings of the selected camera view with only one mouse click

Workflow Wizard

• Guided workflows for wafer setups, alignment tools and Autonomous Assistants
• Workflow wizard shows task-relevant settings and options only
• Wizard settings can be corrected anytime – no need to restart the wizard
• Wizard helps with intelligent solutions in case of error

See "Specifications & Details" tab for more key features

Three Probe Technologies

• Infinity Probe: best for Al (Si)
• ACP Probe: best for AU (III-Vs)
• |Z| Probe: robust solution (long lifetime)
• Precision contact on a wide variety of materials from 26 GHz to 67 GHz
• Accurate results with excellent crosstalk
• Matching cables and substrates included

Precise Contact Solution

• RF chuck ±3 μm surface planarity
• Unique 500 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
• Precision probe alignment
• Consistent contact force and overtravel
• Stable contact performance

WinCal Calibration Software

• Exclusive 1-, 2-, 3-, and 4-port on-wafer calibration algorithms
• Automated calibration monitoring
• Unique measurement & analysis methods
• Accurate S-parameter measurements
• Automatic calibration setup for higher efficiency
• Fast and easy data interpretation and reporting

• Accommodates a combination of up to four Cascade Microtech probes
• Configurable for mixed-signal RF/mmW testing
• Quick and easy repairs to be performed in the field, by simply replacing individual probes
• Adaptable to new device layouts by exchanging individual probes

PureLine 3 Technology

• Provides an effectively noise free environment around the device under test (DUT)
• First automated probe station to achieve -190dB spectral noise*
• Up to 32x lower noise (1kHz), for improved device characterization and modelling at the 7/5/2 nm technology nodes targeted for 5G and beyond applications
• Eliminates over 97% of the environmental noise experienced in previous probe systems
• Extensive collection of FormFactor patents, electrical design knowledge, and measurement system IP

Plug In and Go

• World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
• Eliminates all ground-loop induced TestCell noise
• Low field emissions
• Provides fully managed and filtered AC power to the entire system, prober and instruments

See "Specifications & Details" tab for more key features

SlimVue Microscope

• Combined eye-pieces and CCD camera mount
• 3x zoom and quick lens exchange
• Quick lens exchange
• 1 um optical resolution
• Minimized scope footprint
• Fast change from navigation optics to high-resolution optics
• Resolving ‹ 50 μm pads
• Simple integration with any mmW modules

Application Specific Sigma Kits

• Engraved guides on mmW platen
• Supports broadband, load pull, coax RF and banded waveguide configuration
• Optical feedback on platen position (gauge)
• Adaptable to any mmW/sub-THz applications
• Seamless integration with any mmW modules and tuners
• Fast mounting and setup change

THz measurement capability

• Rock-solid mechanical design
• Submicron stage accuracy
• Optical feedback on platen and probe position (gauge)
• Motorized positioner
• <+-1 um separation repeatability
• Micrometer-accurate and repeatable probe placement and overtravel
• Highly-precise and stable THz measurements

All tools in one belt

• Calibration
• Validation
• Measurement
• Analysis

Advanced functionality

• Multi-Port Hybrid Cals
• Enhanced Verification and Reports
• Post Processing and Sequencing

Get started

• Guided wizards and multimedia tutorials integrated
• Intelligence in setups

Flexible setups

• Standalone for manual probe stations
• Fully integrated in Velox Probe station control software
• Workspaces to build custom configurations that include selected combinations of system setup files, calibration setup files, and reports
• Support of more than 24 of the most common VNA’s