FormFactor - Cascade MPS150 Modular Probe Station
Flexibility
- Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
- Re-configurable and upgradable as requirements grow
- Minimizes setup times with no loss in performance or accuracy
- Seamless integration of various measurement instruments
Stability
- Solid station frame
- Built-in vibration-isolation solution for superior vibration attenuation
- Rigid microscope bridge
- Compact and rigid mechanical design
- Highly accurate measurement results
- Incorporates best-known methods
Ease of Use
- Ergonomic and straightforward design for comfortable and easy operation
- Low-profile design
- Simple microscope operation
- Quick and ergonomic change of DUT through pull-out stage
- Minimize training efforts
- Fast time to data
- Convenient operation
Customize your 150 mm probe station based on flexible modules at an incredible price!
FormFactor introduces a new modular concept for its best-in-class 150 mm probe stations. This will make it even easier to configure your individual probe solution for current and future needs at an incredible price. Simply choose a base station and add as many application-specific starter kits as you need.
Available Options
Microscope
- Stereo Zoom Microscope
- High Resolution Microscope
Application Starter Kit (incl. Probes)
- IV/CV
- RF Basic
- mmW Basic
- Keysight N5291 (Advanced mmW)
- VDI Mini Extenders (Advanced mmW)
- Focus Microwaves Delta Tuners (Advanced Load-pull)
- Advanced THz
- Failure Analyis
- High Power
Positioner Kit
- Basic
- Advanced mmW / THz / Load-pull
Chuck
- Coax
- Triax
- RF
- Thermal
- High Power
Base Station
- Basic
- Advanced mmW / THz / Load-pull
Example: Complete 150 mm Entry-level IV/CV Manual Probe Station
Additional Configuration Examples
Coax – DC parametric test down to pA levels
- Movable platen with 40 mm height adjustment, 200 μm contact / separation stroke and ± 1 μm repeatability
- Chuck stage with adjustable friction & stage lock, unique Z chuck adjustment and 90 mm pull-out
- Magnetic positioners with 1 μm feature resolution and 3 linear axes with precision ball bearing
Triax – Low-noise measurements down to fA levels
- Stereo microscope: 15x–100x magnification with large field-of-view and camera-ready c-mount
- Four triax probe arms and high-quality triax cables
- Light/EMI shielding (optional)
- Upgrade option for fF-level measurements
- TRIAX chuck with ±8 fine theta chuck rotation, three auxiliary areas, chuck surface with ±5 μm planarity for consistent contact force and overtravel
- East/West to North/South measurements with single setup
RF test up to 67 GHz
- Multiple probe technologies available: Infinity Probe, ACP Probe, |Z| Probe, FCP Probes
- Matching cables and substrates included
- RF chuck ±3 μm surface planarity
- Unique 200 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
- WinCal Calibration Software
mmW - 70 GHz through sub-THz and load-pull
- SlimVue microscope with quick lens exchange, 1 μm optical resolution, resolving ‹50 μm pads
- Engraved guides on mmW platen for application-specific SIGMA Kits
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Vibration Isolation Platform
mmW probing up to THz and load-pull
- SlimVue microscope with quick lens exchange, 1 μm opitcal resolution, resolving ‹50 μm pads
- Engraved guides on mmW platen for application-specific SIGMA Kits
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Rock-solid mechanical design and vibration isolation platform
- Submicron stage accuracy
- Motorized positioners
- <+-1 μm separation repeatability
- Micrometer-accuracy and repeatable probe placement and over travel
Failure analysis and design debug
- Stable microscope bridge design and XY microscope with up to 4000x magnification*
- Laser cutter and camera ready
- Contact submicron features
- Simultaneous use of probe card and single needles*
- Chuck ready for single DUT
- Quickest transition from wafer-to-chip-to-package
- Vacuum positioners with 1 μm feature resolution
- DPP450 positioner with nanometer resolution and accuracy*
* Optional - Additional costs apply. Contact sales representative for information.
On-wafer power device characterization
- Multi-purpose SIGMA instrument integration kit
- Triax probe with protected guard
- Seamless integration of various analyzers
- Triax chuck with surface coating for low-leakage measurements up to 3 kV, high-isolation ready
- High-current measurements up to 100 A with lowest contact resistance
- Optional upgrade for 10 kV (coax) operating voltage
- Thin wafer handling capability
- Arcing protection and advanced grounding concept
- Shield Enclosure with interlock for EMI/light-tight environment
- Maximum protection from high-voltage shock for users and devices
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More Product Information
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Ease of use – Less experienced operators can perform an RF calibration up to 500 GHz by simply pushing a button. This reduces the need of experienced users full time on each system.
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Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
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Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
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Calibration Monitor and Re-calibration – System will continuously monitor calibration drift, and automatically re-calibrate the system should the drift exceed a predefined limit.
Superior Mechanics
- Highly stable granite base
- Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
- 1 µm repeatable separation stroke
- Excellent measurement accuracy and repeatability
- Fast navigation and high-precision probe positioning
See "Specifications & Details" tab for more key features
The CSR family of calibration substrates delivers the highest accuracy available due to the high quality of each substrate. The calibration standards are manufactured using rugged, hard gold, which ensures a long lifetime.
- Coaxial and triaxial measurements up to 10,000 V
- High-quality construction with low-noise electrical performance
- Replaceable probe tips in a variety of tip sizes
- Temperature range of of -60°C to 300°C
- Triaxial measurement ensures a much better understanding of device leakage in the off state
- Highly reliable, stable and repeatable measurements
- Integrally designed as part of a complete measurement solution
Flexibility
- DC, AC and RF/microwave device characterization, 1/f, WLR, FA and design debug
- Full thermal range of -60°C to +300°C
- Compatible with TopHat or IceShield
- Usage of manual and motorized positioners, probe cards within EMI-shielded environment
- Upgrade path to meet your future needs
- Stable and repeatable measurements over a wide thermal range
High accuracy and repeatability
- Reliable and repeatable contact
- Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
- Advanced EMI-shielding with PureLine and AttoGuard technologies available
- Superior low-leakage and low-noise measurements
- Safe and accurate hands-off testing
- Minimizes settling times for efficient measurements over full thermal range
See "Specifications & Details" tab for more key features
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight SPA for On-wafer DC Parametric Measurements
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Combination of DC and RF in a single probe module: One dual probe or a maximum of three RF; a maximum of 9 DC standard (other quantities upon request).
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Utilizes ACP tip design, GSG, GS or SG
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RF tips available from DC to 110 GHz
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Choice of BeCu or tungsten tips
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DC power needles come standard with 100 pF microwave capacitor
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Power bypass inductance: 8 nH
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Maximum DC voltage: 50 V without power bypassing (25 V with standard power bypassing, and component dependent with custom power bypassing)
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Ideal for probing the entire circuit for functional test
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Dual ACP configuration supports differential signaling applications
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DC probes can provide power or slow logic to circuit under test
- High performance power bypassing provides low-impedance and resonant-free connections to 20 GHz
- RF bandwidth to 500 MHz
- Long probe life: > 250,000 contacts
- Beryllium-copper tips for gold pads or tungsten for aluminum pads
- Oscillation-free testing of wide-bandwidth analog circuits
- Use with ACP series probes to provide functional at-speed testing for known-good-die
- Mix multiple contact types: Ground, Power (Standard or Eye-Pass), Logic/Signal
- Low and repeatable contact resistance on aluminum pads ( < 0.25 Ω on Al, < 0.01 Ω on Au)
Focus Microwaves' Harmonic Tuners are engineered to enable precise control of impedance at the fundamental and harmonic frequencies (typically f₀, 2f₀, and 3f₀), making them essential for nonlinear device characterization and power amplifier design.
These tuners feature multiple cascaded probes within a single tuner body, allowing independent or simultaneous tuning at multiple frequencies. Their robust design ensures high tuning accuracy, minimal insertion loss, and excellent repeatability across a broad frequency range. Harmonic tuners are the ideal solution for advanced Load Pull measurements where harmonic control is critical.
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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