FormFactor - Cascade MPS150 Modular Probe Station
Flexibility
- Ideal for a wide range of applications such as RF, mm-Wave and sub-THz characterization, FA, DWC, MEMS, optoelectronic tests and WL
- Re-configurable and upgradable as requirements grow
- Minimizes setup times with no loss in performance or accuracy
- Seamless integration of various measurement instruments
Stability
- Solid station frame
- Built-in vibration-isolation solution for superior vibration attenuation
- Rigid microscope bridge
- Compact and rigid mechanical design
- Highly accurate measurement results
- Incorporates best-known methods
Ease of Use
- Ergonomic and straightforward design for comfortable and easy operation
- Low-profile design
- Simple microscope operation
- Quick and ergonomic change of DUT through pull-out stage
- Minimize training efforts
- Fast time to data
- Convenient operation
Customize your 150 mm probe station based on flexible modules at an incredible price!
FormFactor introduces a new modular concept for its best-in-class 150 mm probe stations. This will make it even easier to configure your individual probe solution for current and future needs at an incredible price. Simply choose a base station and add as many application-specific starter kits as you need.
Available Options
Microscope
- Stereo Zoom Microscope
- High Resolution Microscope
Application Starter Kit (incl. Probes)
- IV/CV
- RF Basic
- mmW Basic
- Keysight N5291 (Advanced mmW)
- VDI Mini Extenders (Advanced mmW)
- Focus Microwaves Delta Tuners (Advanced Load-pull)
- Advanced THz
- Failure Analyis
- High Power
Positioner Kit
- Basic
- Advanced mmW / THz / Load-pull
Chuck
- Coax
- Triax
- RF
- Thermal
- High Power
Base Station
- Basic
- Advanced mmW / THz / Load-pull
Example: Complete 150 mm Entry-level IV/CV Manual Probe Station
Additional Configuration Examples
Coax – DC parametric test down to pA levels
- Movable platen with 40 mm height adjustment, 200 μm contact / separation stroke and ± 1 μm repeatability
- Chuck stage with adjustable friction & stage lock, unique Z chuck adjustment and 90 mm pull-out
- Magnetic positioners with 1 μm feature resolution and 3 linear axes with precision ball bearing
Triax – Low-noise measurements down to fA levels
- Stereo microscope: 15x–100x magnification with large field-of-view and camera-ready c-mount
- Four triax probe arms and high-quality triax cables
- Light/EMI shielding (optional)
- Upgrade option for fF-level measurements
- TRIAX chuck with ±8 fine theta chuck rotation, three auxiliary areas, chuck surface with ±5 μm planarity for consistent contact force and overtravel
- East/West to North/South measurements with single setup
RF test up to 67 GHz
- Multiple probe technologies available: Infinity Probe, ACP Probe, |Z| Probe, FCP Probes
- Matching cables and substrates included
- RF chuck ±3 μm surface planarity
- Unique 200 μm platen contact/ separation stroke with ≤± 1 μm accuracy for repeatable contact
- WinCal Calibration Software
mmW - 70 GHz through sub-THz and load-pull
- SlimVue microscope with quick lens exchange, 1 μm optical resolution, resolving ‹50 μm pads
- Engraved guides on mmW platen for application-specific SIGMA Kits
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Vibration Isolation Platform
mmW probing up to THz and load-pull
- SlimVue microscope with quick lens exchange, 1 μm opitcal resolution, resolving ‹50 μm pads
- Engraved guides on mmW platen for application-specific SIGMA Kits
- Supports broadband, load pull, coax RF and banded waveguide configuration
- Optical feedback on platen position (gauge)
- Rock-solid mechanical design and vibration isolation platform
- Submicron stage accuracy
- Motorized positioners
- <+-1 μm separation repeatability
- Micrometer-accuracy and repeatable probe placement and over travel
Failure analysis and design debug
- Stable microscope bridge design and XY microscope with up to 4000x magnification*
- Laser cutter and camera ready
- Contact submicron features
- Simultaneous use of probe card and single needles*
- Chuck ready for single DUT
- Quickest transition from wafer-to-chip-to-package
- Vacuum positioners with 1 μm feature resolution
- DPP450 positioner with nanometer resolution and accuracy*
* Optional - Additional costs apply. Contact sales representative for information.
On-wafer power device characterization
- Multi-purpose SIGMA instrument integration kit
- Triax probe with protected guard
- Seamless integration of various analyzers
- Triax chuck with surface coating for low-leakage measurements up to 3 kV, high-isolation ready
- High-current measurements up to 100 A with lowest contact resistance
- Optional upgrade for 10 kV (coax) operating voltage
- Thin wafer handling capability
- Arcing protection and advanced grounding concept
- Shield Enclosure with interlock for EMI/light-tight environment
- Maximum protection from high-voltage shock for users and devices
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More Product Information
Customized Solutions for a Variety of Challenging Applications
We are your partner for challenging applications. Our comprehensive technical and application know-how over all probe system platforms and our expertise for customized products is based on an extensive experience over many years. We offer a special demo support in-house or at the customer, as well as after sales support for complicated setups.
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Cryogen-free option available
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Flexible sample space
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Low noise, low vibration
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Long holding time
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Stable He-3 pot temperature
Flexibility
- Different substrate carriers for wafers up to 200 mm or single dies
- Probe cards and/or up to eight positioners
- Optional thermal chuck (-60°C to 300°C) and pressure regulation
- Accessories available, such as black bodies and optical motion analysis tools
- Optional upgrade for 300 mm wafer
- Designed for industrial environments
- Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
- Ideal for small structures
See "Specifications & Details" tab for more key features
Superior Mechanics
- Highly stable granite base
- Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
- 1 µm repeatable separation stroke
- Excellent measurement accuracy and repeatability
- Fast navigation and high-precision probe positioning
See "Specifications & Details" tab for more key features
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight Photonics Application
- Substrate material: High-resistivity silicon
- Substrate thickness: 275 µm
- Dielectric constant: 11.8
- Nominal Z0: 50 Ω
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Low running costs, less vibration, less noise, reduced maintenance
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Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
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CMN calibrated thermometry on MC plate
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Operation via touch panel controller: Remote operation via ethernet interface
- Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
- Guarantees fully-guarded measurements to fA and fF levels
- Individual connectors provide force-sense connection for quasi-Kelvin and CV measurements
- Allows probing of different pad materials and sizes
- Fast replacement of worn probes without the need for tools
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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