FormFactor - Cascade PAV200 - 200 mm semi-automated vacuum probe system

  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer
  • User-centered design minimizes training costs and enhances efficiency
See more Key Features on Specifications & Details tab

Applications

  • IV/CV
  • MEMS
  • Opto
  • RF/mmW/THz

Flexibility

  • Different substrate carriers for wafers up to 200 mm or single dies
  • Probe cards and/or up to eight positioners
  • Optional thermal chuck (-60°C to 300°C) and pressure regulation
  • Accessories available, such as black bodies and optical motion analysis tools
  • Optional upgrade for 300 mm wafer
  • Designed for industrial environments
  • Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)
  • Ideal for small structures

Stability

  • Probe positioners placed inside vacuum chamber
  • Short and stable probe arms
  • Solid station frame with built-in vibration-isolation
  • Optional microscope bridge
  • Precise probe positioning
  • Excellent measurement accuracy and repeatability
  • Superior vibration attenuation
  • Stable image quality for demanding MEMS analysis

Ease of use

  • Joystick controller
  • Manual probe positioners with rotary feed-throughs
  • Front loading capability through load door
  • Comfortable and easy operation
  • Quick and ergonomic change of DUT

High measurement throughput

  • Software control of chuck for fast step-and-repeat testing of the entire wafer
  • Fast step-and-repeat testing of the whole wafer

Velox Probe Station Control Software

  • User-centered design minimizes training costs and enhances efficiency
  • Comprehensive alignment functions – from simple wafer alignment and mapping to automated alignment and test of multiple singulated chips, like IR – Focal Plane Arrays
  • Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
  • VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

More Product Information

FormFactor, Inc.

FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test. 

We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.


Contact Details 

FormFactor, Inc. Corporate Headquarters

7005 Southfront Road, Livermore, CA 94551, USA

Phone: 925-290-4000 

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Test & Measurement

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FormFactor - Cascade PAV200 - 200 mm semi-automated vacuum probe system
FormFactor - Cascade PAV200 - 200 mm semi-automated vacuum probe system
FormFactor - Cascade PAV200 - 200 mm semi-automated vacuum probe system
FormFactor - Cascade PAV200 - 200 mm semi-automated vacuum probe system