FormFactor - Cascade Shield Enclosure Light-tight probing
-
Light-tight version and EMI-shielded version for low noise and light-sensitive measurements
-
Application flexibility, ideal for use in high frequency applications
-
Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system
-
Suitable for integration with vibration isolating tables
Shield Enclosures are designed for durable stability and sized to accommodate analytical probers equipped with all kinds of accessories, including thermal chucks, laser cutters, TV and emission cameras. The EMI-shielded version guarantees a light-tight and electromagnetically shielded environment for all sensitive measurements.
More Product Information

-
Pulse tube cryocooler for cryogen free 4K temperatures
-
Two stage ADR provides solid state cooling down to 30mK
-
Sample stage mounting at both 1K and 50mK
-
Multiple stage feedthroughs for thermally intercepting the signals
-
Two large electrical bread boards for more configurable space
-
Rapid cool options for faster cooldowns

-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Joystick controller
-
Manual probe positioners with rotary feed-throughs
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer
-
User-centered design minimizes training costs and enhances efficiency

-
On-Off power switch
-
20 A Circuit Breaker
-
Inlet - NEMA L6-20
-
Outlets – NEMA L6-20R
-
3ft.
-
(2) fork terminals (current)
-
(1) fork terminals (ground)
-
(2) Shielded Banana (voltage)

-
Easy and fast setup of camera views
-
Go to Light and Image Settings of the selected camera view with only one mouse click
-
Guided workflows for wafer setups, alignment tools and Autonomous Assistants
-
Workflow wizard shows task-relevant settings and options only
-
Visualizes the progress of setup, alignment and measurement tasks
-
Status information always at hand
-
Informs the user about events, for example “Successful Alignment”
-
Interacts with the user and helps with intelligent solutions
-
For very complex wafer structures
-
Enables automatic test of multiple devices in each die location before stepping to the next die

-
Re-configurable for DC, RF, mmW, FA, WLR and more
-
Thermal range: -60˚C to 300˚C available
-
Upgrade path to meet your future needs
-
Stable and repeatable measurements over a wide thermal range
-
Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
-
Advanced EMI-shielding with PureLine with AttoGuard technologies
-
Best solution for low-noise and 1/f measurements
-
Minimize AC and spectral noise
-
Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
-
Locking roll-out stage
-
Innovative microscope remote control
-
Intuitive ergonomic stage controls
-
Quick, safe, and comfortable wafer access
-
Easy on-wafer navigation
-
Fast setup and test data gathering
-
Dedicated Velox version for manual probe stations
-
AugmentedAlign tool with on screen markers for improved RF measurement accuracy

-
Quick and easy probe tip navigation
-
Z drive can work in the same range as the chuck
-
Enables higher separation gap while the DUT stays in focus
-
Automatically configure and optimize performance
-
24/7 operating
-
Increased MTBF
-
Protects the measurement setup
-
Prevents involuntary mechanical contact between lens and probes

-
Customizable configuration up to 25 contacts: RF, Eye-Pass power, ground, logic
-
Lithographically-defined tips allow automated over temperature measurement on pads as small as 30 µm x 50 µm
-
Low and repeatable contact resistance on aluminum pads (< 0.05 Ω) ensures accurate results
-
Durable probe structure ensures more than 250,000 contacts
-
Able to measure from -40°C to +125°C without compromising performance or accuracy of specifications

-
Probe station
-
Keysight Streamline Vector Network Analyzer (option up to 53 GHz)
-
Choice of probes
-
Known measurement accuracy traced back to independent standards
-
Uses best measurement practices for optimized measurements
-
Best in class RF and Microwave performance
-
Small benchtop footprint

- On-Off power switch
- 20 A Circuit Breaker
- 8’ Flexible Power Cord
- Outlets – (4) 5-20R
- 3ft.
- (2) fork terminals (current)
- (1) fork terminals (ground)
- (2) Shielded Banana (voltage)

FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
