Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight PNA for On-wafer R&D Measurements from RF to millimeter wave to Terahertz

Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight SPA for On-wafer DC Parametric Measurements

The LWP series Lightwave Probe enables optical measurements for on-wafer and hybrid photonics devices. It features user replaceable fiber pigtails allowing the probe to be optimized for a variety of light delivery and light collection applications including the characterization of topside illuminated photodiodes, Vertical Cavity Surface Emitting Lasers (VCSELs), hybrid transmitters and receivers, and LEDs.

T-Wave Waveguide Banded Probes

• Low insertion loss
• Low contact resistance
• 140 GHz – 1.1 THz versions
• Probe pitch as narrow as 25 μm
• Lithographically-defined probe tip
• Nickel contacts

See "Specifications & Details" tab for more key features

• Light-tight version and EMI-shielded version for low noise and light-sensitive measurements
• Application flexibility, ideal for use in high frequency applications
• Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system
• Suitable for integration with vibration isolating tables

Flexibility

• Different substrate carriers for wafers up to 100 mm or single dies
• Up to six positioners
• Use with liquid nitrogen or helium, depending on the target temperature
• Probing with an open chamber lid possible under atmospheric condition
• Specially designed for laboratory environments
• Covers wide range of measurements (I-V, C-V, RF, MEMS, OPTO)

See "Specifications & Details" tab for more key features

SlimVue Microscope

• Combined eye-pieces and CCD camera mount
• 3x zoom and quick lens exchange
• Quick lens exchange
• 1 um optical resolution
• Minimized scope footprint
• Fast change from navigation optics to high-resolution optics
• Resolving ‹ 50 μm pads
• Simple integration with any mmW modules

Application Specific Sigma Kits

• Engraved guides on mmW platen
• Supports broadband, load pull, coax RF and banded waveguide configuration
• Optical feedback on platen position (gauge)
• Adaptable to any mmW/sub-THz applications
• Seamless integration with any mmW modules and tuners
• Fast mounting and setup change

THz measurement capability

• Rock-solid mechanical design
• Submicron stage accuracy
• Optical feedback on platen and probe position (gauge)
• Motorized positioner
• <+-1 um separation repeatability
• Micrometer-accurate and repeatable probe placement and overtravel
• Highly-precise and stable THz measurements

• Power bypass inductance: 8 nH
• Standard DCQ probes have flat tip needles available in nickel-plated tungsten or BeCu with diameters of 0.75 mil, 1.0 mil and 1.5 mil.
• Supports collinear and non-standard needle configurations
• Up to 16 DC for standard; maximum of 24 DC for custom
• Ideal for probing the entire circuit for functional test
• DC probes can provide power or slow logic to circuit under test