FormFactor - Kilimanjaro 125 - Chip-scale semi-automated 4K probe station with vibration isolation
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Fully isolated experiment space for true 4K temperatures during probing
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Cryogenic positioners to provide large travel ranges without warming up the device
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Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
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A soft vacuum bellows provides a compliant mounting interface for the cryocooler
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Quick release vacuum feedthroughs for easy configurability
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A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
Ultra Low Vibration Chip-scale Probe Station for Conducting High-Accuracy Measurements at True 4K Cryogenic Temperatures
The HPD Kilimanjaro 125 is a superior 4K solution to meet all your probing needs with an emphasis on ultra low vibration applications. Like the Kilimanjaro 122, this system addresses problems such as long turnaround times, high noise, and low signal capabilities. FormFactor’s superior knowledge of probing solutions and cryogenic systems puts us in the best position to help you meet your goals.
This system employs a range of thermal isolation techniques to take full advantage of all the cooling power available. We have taken extra care to ensure all signals are well sunk before reaching your sample. All interfaces have been specially designed to block any radiation from disturbing your sample. The optical ports can be optionally fitted with light blocking shutters at both 4K and 50K to remove any parasitic heat loads. The result is a true 4K system with a temperature stability 5mK.
Mechanical vibration is also a major issue for probing applications. Large displacements can cause damage to the sample and induce noise into the measurement. Triboelectric noise is also induced into the signals when mechanical vibrations travel through the cables. This system builds on the Kilimanjaro 122 with a rigid support tube that couples the vibrations from the cooler directly into the floor away from your experiment. The result is probe to DUT displacement of less than 50nm RMS.
Designed with customization in mind, the Kilimanjaro 122 provides many configurable ports to get your signals to your sample. There are multiple easily accessible vacuum feedthroughs, and many light blocking ports in each stage plate. This approach makes it simple to address whatever signal (DC, RF, FO) capabilities you may need.
The HPD Kilimanjaro 125 offers true 4K measurement during all probing operations in an ultra low vibe system. It is a robust and reliable system, which offers a broad array of optional features. Multiple upgrade paths ensure this system will fulfill many future needs.
Applications: Photonic QC, Spin QC, Cryo-CMOS
Cryogenic Temperatures
- Fully isolated experiment space for true 4K temperatures during probing
- Cryogenic positioners to provide large travel ranges without warming up the device
- Integrated helium pot for high temperature stability of the device under test
- Fully dry cryogen-free cooler eliminates the need for expensive helium circulation systems
- Rapid cool liquid nitrogen option for faster cool down times
Low Vibration
- Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
- A soft vacuum bellows provides a compliant mounting interface for the cryocooler
- Rigid support tube to direct vibrations from the cryocooler away from the sample
Configurability
- Quick release vacuum feedthroughs for easy configurability
- A large rectangular port for high signal capacity
- Multiple stage feedthroughs for thermally intercepting the signals
- Many available system options and add ons to choose from
More Product Information
DC, RF and Optical Probe Positioning for Highest Accuracy Measurements
FormFactor offers a wide variety of manual and motorized probe positioners for any application from DC to terahertz measurements and beyond.
Ultra Low Temperature
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Pulse tube cryocooler for cryogen free 4K temperatures
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Two stage ADR provides solid state cooling down to 30mK
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Sample stage mounting at both 1K and 50mK
Configurability
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Multiple stage feedthroughs for thermally intercepting the signals
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Two large electrical bread boards for more configurable space
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Rapid cool options for faster cooldowns
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
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Low running costs, less vibration, less noise, reduced maintenance
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Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
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CMN calibrated thermometry on MC plate
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Operation via touch panel controller: Remote operation via ethernet interface
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Re-configurable for DC, RF, mmW, FA, WLR and more
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Thermal range: -60˚C to 300˚C available
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Upgrade path to meet your future needs
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Stable and repeatable measurements over a wide thermal range
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Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
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Advanced EMI-shielding with PureLine with AttoGuard technologies
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Best solution for low-noise and 1/f measurements
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Minimize AC and spectral noise
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Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
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Locking roll-out stage
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Innovative microscope remote control
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Intuitive ergonomic stage controls
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Quick, safe, and comfortable wafer access
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Easy on-wafer navigation
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Fast setup and test data gathering
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Dedicated Velox version for manual probe stations
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AugmentedAlign tool with on screen markers for improved RF measurement accuracy
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Ideal for multiport RF/Microwave and high-speed digital signal testing
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Mix DC and RF/Microwave signals on one probe
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Long lifetime – typically over one million (1,000,000) touchdowns
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Excellent performance in temperatures ranging from 10 K to 200°C
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Probe on any pad material with no damage
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Highly stable granite base
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Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges
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Re-configurable for DC, RF, mmW, FA, WLR and more
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Multiple accessories: Thermal chucks, motorized microscopes and positioners, dark box, and more
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Low-profile, straightforward design
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Easy and ergonomic operation
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Front or backside instrumentation, e.g.: Integrating Sphere, Fiber setup, Pressure Module
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Front or backside probing capability
See more Key Features on Specifications & Details tab
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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Intuitive, manual drives
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Front loading capability through load door
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
See more Key Features on Specifications & Details tab
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Low running costs, less vibration, less noise, reduced maintenance
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Large convenient experimental access: Up to 12 line-of-sight ISO100 ports located on perimeter of plates
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CMN calibrated thermometry on MC plate
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Operation via touch panel controller: Remote operation via ethernet interface
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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