FormFactor - HPD IQ3000 - Fully automated cryogenic wafer probing at 4K
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Wafer temp verified <4.5 K (with 44 RF probes in contact)
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Magnetic field suppression to <200 nT
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Easy exchange of customizable probe cards
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Configurable for 150 mm, 200 mm and 300 mm wafers
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Options for fully automated wafer load or manual
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Complete software suite for manual, semi-auto, or fully automated probing
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25 wafer cassette capacity for fully automated testing
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~15 minute cooldown time per wafer
See more Key Features in Specifications & Details tab
The HPD IQ3000 is a high precision fully automated probe station for 150 mm, 200 mm or 300 mm substrates in a 4 K environment. To accelerate the realization of commercial quantum and superconducting computers, we provide chip developers with the tools they need to intelligently iterate on their designs.
The IQ3000 integrates configurable DC and RF cabling, with custom probe cards available for ultimate flexibility of test configurations. A robust design with integrated magnetic shielding provides the stable environmental conditions necessary to ensure the highest quality data for the most sensitive superconducting devices. Fully automated wafer loading and the sophisticated Velox™ software suite allows for high throughput testing and unattended operation for rapid time-to-data.
FormFactor’s longstanding probing expertise and decades of precision cryogenic experience come together in this system to take superconducting device test and measurement out of the lab into fab.
Applications: Quantum computing, superconducting chip development, quantum information science
Environmental Control
- Wafer temp verified <4.5 K (with 44 RF probes in contact)
- Magnetic field suppression to <200 nT
- Highly uniform wafer temperature
- Precise thermal stability and control
- Solid construction with granite base enables precision motion and vibration control
Flexibility
- Easy exchange of customizable probe cards
- Configurable for 150 mm, 200 mm and 300 mm wafers
- Up to 56 RF coax (up to 18 GHz)
- Up to 520 DC lines
Automation
- Options for fully automated wafer load or manual
- Complete software suite for manual, semi-auto, or fully automated probing
Time to data
- 25 wafer cassette capacity for fully automated testing
- ~15 minute cooldown time per wafer
- High speed motion stages for quick die-to-die movement
- Rigid motion stack for fast settling time
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More Product Information
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight SPA for On-wafer DC Parametric Measurements
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Re-configurable for DC, RF, mmW, FA, WLR and more
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Thermal range: -60˚C to 300˚C available
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Upgrade path to meet your future needs
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Stable and repeatable measurements over a wide thermal range
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Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
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Advanced EMI-shielding with PureLine with AttoGuard technologies
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Best solution for low-noise and 1/f measurements
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Minimize AC and spectral noise
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Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
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Locking roll-out stage
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Innovative microscope remote control
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Intuitive ergonomic stage controls
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Quick, safe, and comfortable wafer access
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Easy on-wafer navigation
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Fast setup and test data gathering
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Dedicated Velox version for manual probe stations
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AugmentedAlign tool with on screen markers for improved RF measurement accuracy
Ultra Low Temperature
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Pulse tube cryocooler for cryogen free 4K temperatures
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He-3 sorption cooler for high power intercept and launch stage for ADR
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Single stage ADR provides solid state cooling down to 25mK
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Sample stage mounting at both 300mK and 30mK
Configurability
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Multiple stage feedthroughs for thermally intercepting the signals
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Two large electrical bread boards for more configurable space
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Rapid cool options for faster cooldowns
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Ideal for multiport RF/Microwave and high-speed digital signal testing
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Mix DC and RF/Microwave signals on one probe
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Long lifetime – typically over one million (1,000,000) touchdowns
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Excellent performance in temperatures ranging from 10 K to 200°C
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Probe on any pad material with no damage
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight Photonics Application
Customized Solutions for a Variety of Challenging Applications
We are your partner for challenging applications. Our comprehensive technical and application know-how over all probe system platforms and our expertise for customized products is based on an extensive experience over many years. We offer a special demo support in-house or at the customer, as well as after sales support for complicated setups.
For more information please contact your local sales representative.
FormFactor's FRT Metrology engineers designed SurfaceSens technology to achieve superior information about the measured sample and greater insights about product quality. All of our FRT MicroProf® metrology tools can be configured with complementary sensor technologies. In a hybrid analysis process, otherwise inaccessible surface data of wafers or other samples are precisely measured.
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Fully isolated experiment space for true 4K temperatures during probing
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Cryogenic positioners to provide large travel ranges without warming up the device
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Flexible thermal jumpers to ensure high thermal conductance and low mechanical transmission
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A soft vacuum bellows provides a compliant mounting interface for the cryocooler
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Quick release vacuum feedthroughs for easy configurability
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A large rectangular port for high signal capacity
See more Key Features in Specifications & Details tab
-
Wafer temp verified <4.5 K (with 44 RF probes in contact)
-
Magnetic field suppression to <200 nT
-
Easy exchange of customizable probe cards
-
Configurable for 150 mm, 200 mm and 300 mm wafers
-
Options for fully automated wafer load or manual
-
Complete software suite for manual, semi-auto, or fully automated probing
-
25 wafer cassette capacity for fully automated testing
-
~15 minute cooldown time per wafer
See more Key Features in Specifications & Details tab
FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
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