FormFactor - Cascade Vibration Isolation Tables - Tables from simple to highly sensitive
-
Designed for use with specific Probe Systems
-
Tables to suit all facility requirements and applications
-
Stable probing, even in submicron range
-
Granite platen ensures rigidity and temperature stability
-
Can be combined with the Shield Enclosures
Full range of vibration isolation tables
Working with increasingly small scales of reference means that any vibration however minimal, even from the equipment itself, will seriously degrade a probe station’s performance. Slight vibrations will cause the probes to jump and miss their contacts and the microscope image will be blurred. Our range of vibration isolation tables includes a simple table for general working conditions as well as specifically designed tables for very sensitive measurements such as in the submicron range.
More Product Information

-
Load-lock chamber: Cycle devices 10X faster in a cryogenic environment
-
High-density electrical interface at cryogenic temperatures: More pins on the device enables more test structures to be probed with a single cooldown
-
Base temperature of < 2K or < 4K with high cooling power: Test devices at the temperatures that matter most for pre- screening and evaluating device performance
-
Low vibration: Stable contact with the device under test and enables low noise measurements

- 4-Channel, 204.8 Ksa/s per channel, 24-Bit DACs
- -115 dB spurious free dynamic range
- Integrated 2-Channel 64-bit tachometer
- Integrated 4-Channel DIO
- Tight synchronization with DSA analyzers
- Ideal for rotational measurement, and stimulus-response applications such as vibration test
- Output modes including Sine, Burst Sine, Chirp, Burst-random and continuous random

-
Ease of use – Less experienced operators can perform DC measurements by simply pushing a button. This reduces the need of experienced users full time on each system.
-
Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
-
Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.

-
Comprehensive I/O connections: Standard setup of up to 24 RF lines (up to 20 GHz) and 48 DC lines, with extensions to higher I/O connections possible.
-
Non-magnetic construction: Capable of characterizing qubits below 50 mK without magnetic interference when required.
-
Sample size: Proven with chips up to 10×10 mm in size.
-
Pressure-based contact: Connect test and measurement I/O to DUT pads using pressure only. No permanent connection required.

-
Enables wafer probing up to 100 A pulsed and 10A DC
-
Innovative multi-fingertip design provides even distribution of current
-
Supports up to 500 V
-
Replaceable Tungsten probe tips
-
Temperature range of -60°C to 300°C
-
Minimal contact resistance at the pad-tip junction to reduce heating during measurements, with fewer probe marks
-
Prevents against thermal runaway
-
Measure devices on wafer at higher currents than ever before
-
Small scrub minimizes damage to aluminum pad
-
Small footprint – tip fits on a 1 mm pad

-
Ideal for multiport RF/Microwave and high-speed digital signal testing
-
Mix DC and RF/Microwave signals on one probe
-
Long lifetime – typically over one million (1,000,000) touchdowns
-
Excellent performance in temperatures ranging from 10 K to 200°C
-
Probe on any pad material with no damage

-
On-wafer power device characterization up to 10,000 V DC / 600 A
-
Safe and convenient integration kits to support T.I.P.S. “LuPo” High Voltage / High Power Probe Cards
-
Prevent thin wafers from curling and breaking
-
Safety interlock system with clear enclosure for operator safety during device measurements
-
Convenient connection kits for easy and safe system integration with power device analyzers from Keysight Technologies and major suppliers
-
Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
-
Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware

-
Ease of use – Less experienced operators can perform an RF calibration up to 500 GHz by simply pushing a button. This reduces the need of experienced users full time on each system.
-
Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
-
Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
-
Calibration Monitor and Re-calibration – System will
continuously monitor calibration drift, and automatically re-calibrate the system should the drift exceed a predefined limit.

-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Joystick controller
-
Manual probe positioners with rotary feed-throughs
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer
-
User-centered design minimizes training costs and enhances efficiency

FormFactor, Inc.
FormFactor, Inc. (NASDAQ:FORM) is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.
We constantly strive to help our customers solve the advanced test and measurement challenges of the broader semiconductor industry. Our focus on customer partnership, innovation, agility and operational excellence allows us to earn sustainable business every day.
Contact Details
FormFactor, Inc. Corporate Headquarters
7005 Southfront Road, Livermore, CA 94551, USA
Phone: 925-290-4000
Test & Measurement
