Different substrate carriers for wafers up to 150 mm or single dies Up to six positioners Probe positioners placed inside vacuum chamber Short and stable probe arms

Highly stable granite base Independent, coarse movement of X and Y axes, combined with easy fine adjustments Re-configurable for DC, RF, mmW, FA, WLR and more Full thermal range of -60°C to +300°C

Highly stable granite base Independent, coarse movement of X and Y axes, combined with easy fine adjustments down to submicron ranges Re-configurable for DC, RF, mmW, FA, WLR and more

Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Independently cooled cold shield Probe positioners placed inside vacuum chamber

Different substrate carriers for wafers up to 200 mm or single dies Probe cards and/or up to eight positioners Probe positioners placed inside vacuum chamber Short and stable probe arms

DC, RF and Optical Probe Positioning for Highest Accuracy Measurements FormFactor offers a wide variety of manual and motorized probe positioners for any application from DC to terahertz measurements and beyond.

Light-tight version and EMI-shielded version for low noise and light-sensitive measurements Application flexibility, ideal for use in high frequency applications Sized to accommodate thermal chucks, laser cutter, and video equipment on the probe system

Re-configurable for DC, RF, mmW, FA, WLR and more Thermal range: -60˚C to 300˚C available Upgrade path to meet your future needs Stable and repeatable measurements over a wide thermal range

Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies Enables up to 5x faster time to accurate data

On-wafer power device characterization up to 10,000 V DC / 600 A Safe and convenient integration kits to support T.I.P.S. “LuPo” High Voltage / High Power Probe Cards Prevent thin wafers from curling and breaking

Advanced MicroVac chuck surface for minimum contact resistance between wafer and chuck Safety-rated interlock system for high-power testing (meets EN 60947-5-1, EN 60204-1)

Easy and fast setup of camera views Go to Light and Image Settings of the selected camera view with only one mouse click Guided workflows for wafer setups, alignment tools and Autonomous Assistants Workflow wizard shows task-relevant settings and options only