Overview
Specifications & Details
Datasheets & Downloads
Videos

Measurement Accuracy

Best solution for high accuracy IV/CV, low-noise and 1/f measurements with PureLine, AutoGuard and next generation MicroChamber technologies
Minimize AC and spectral noise with effective shielding capability
Achieve unsurpassed RF/mmW measurement and calibration accuracy with integrated RF tools and WinCal
Shortest signal path test integration for accurate, thermally stable, and low-error data collection

See "Specifications & Details" tab for more key features

Manufactured By: FormFactor, Inc.

More

200 mm Probe Station for Collecting High-accuracy Measurement Data up to 5X Faster

The new Cascade SUMMIT200 advanced 200mm probe system, is essential for collecting high accuracy measurement data on single or volume wafers; as fast as possible.

Designed for R&D, device characterization/modelling or niche production applications, the SUMMIT200 probe station enables precision electrical measurements over temperature for ultra-low noise, DC, RF, mmW and THz applications, with semi-automatic and now fully-automatic operation, for fastest time to accurate data.

The next generation probe system supports PureLine™ technology to achieve one of the lowest noise levels available on the market. Patented AttoGuard® and MicroChamber® technologies significantly improve low-leakage and low-capacitance measurements. A new advanced 200 mm fast stage, cassette handling up to 50 wafers, high throughput test features, and wide temperature range of -60°C to 300°C, provides everything needed for the scientist, R&D and test engineer, or production operator to get their job done fast.

The SUMMIT200 probe station supports Contact Intelligence™ – a unique technology which enables autonomous semiconductor test. A powerful combination of innovative system design and state of the art image processing provides an operator-independent solution to achieve highly-reliable measurement data at any time and temperature.

With a wide range of applications, and upgrade paths to meet any future needs, the SUMMIT200 provides the most advanced 200 mm probe station platform for fast, high accuracy and high-volume measurements for existing and future devices and ICs.

*The SUMMIT200 platform is also available in different versions for measurement tasks that do not need the enhanced feature set as described above. Please refer to Data Sheet for details and options.

Applications

Failure Analysis
IV/CV
MEMS
RF/mmW/THz
Silicon Photonics

Productivity

Enables up to 5x faster time to accurate data
Advanced 200 mm stage with increased test throughput
High throughput UT/MT (Unattended Test over Multiple Temperatures) with VueTrack™ and High-Temperature Stability (HTS) technologies
Automated wafer handling with optional loader
Faster time to first data for standard and “hard to test” devices such as thin wafer, small pad and high power
eVue digital imaging system with enhanced optical visualization, fast set-up, and in-die and wafer navigation
Powerful automation tools reduce total test time on wafers, singulated dies, and modules

Positioning Accuracy

Advanced 4-axis semi-automatic stage for accurate positioning and repeatable probe-to-pad contact
Precision sub-micron positioning and active thermal compensations with motorized positioners and VueTrack PRO
Additional quick “hands on” wafer positioning with manual ergonomic controls

Flexibility and application-tailored solutions

Thermal Measurements

Wide range of extremly performant, reliable thermal chuck systems from ATT
Flexibility from hot only to full thermal range of -60°C to +300°C
Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
Up to 15% faster transition times than other systems in the market
Patented MicroVac™ and FemtoGuard™ Technologies, providing ultra-low noise measurements and controlled leakage, low residual capacitance for repeatability and advanced measurement accuracy and speed
Field-upgradeable: grows with your needs

Ease of use

Comfortable and ergonomic operation
Quick and comfortable manual wafer access via locking roll-out stage
Easy on-screen navigation, wafer mapping, and operation of accessories and thermal systems with Velox

Velox Probe Station Control Software

User-centered design minimizes training costs and enhances efficiency
Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
Comprehensive alignment functions – from simple wafer alignment and mapping to advanced probe-to-pad alignment over multiple temperatures for autonomous semiconductor test
Simplified operation for inexperienced users: Reduced training costs with Workflow Guide and condensed graphical user interface
Loader integration – Easy creation of workflows and receipts and no need for any additional software
VeloxPro option: SEMI E95-compliant test executive software that enables simplified and safe automation of the entire wafer test cycle

Velox Dash™

Modern User Interface with Touch Screen: Convenient probe station operation with just a touch of a finger
Access to Most Common Probe Station Functionalities: Fast and efficient probe station operation
Intuitive and Customizable to Operator’s Needs: Simplified operation, even for inexperienced users
Integrated Solution: Replaces mechanical joystick and eVue remote control