Focus Microwaves - On-Wafer Delta Tuners
- 120GHz Delta | 24-120GHz F0, 2F0, 3F0
- High Frequency Delta | 2-50GHz F0
- High Frequency Delta | 5-67GHz F0, 2F0, 3F0
- Low Frequency Delta | 1.8-40GHz F0, 2F0, 3F0
Integrations | Delta Tuners for On-Wafer Measurements
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Integration with FormFactor
- Integration with MPI
On-Wafer DELTA Tuners' List
Model |
Min Frequency |
Max Frequency |
VSWR |
Connector Type |
Type |
Datasheets |
C2607 | 0.7 GHz | 26.5 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
C3018 | 1.8 GHz | 30.0 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
C3620 | 2.0 GHz | 36.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
C4030 | 3.0 GHz | 40.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
C4060B | 6.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
C4080B | 8.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
C5020B | 2.0 GHz | 50.0 GHz | ≥ 10:1 | 2.4 mm | f0 (Low Frequency DELTA) | |
C5060B | 6.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
C5080B | 8.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
C6750B | 5.0 Ghz | 67.0 GHz | ≥ 6:1 | 1.85 mm | f0 (Low Frequency DELTA) | |
C67100B | 10.0 GHz | 67.0 GHz | ≥ 10:1 (typ. 15:1) | 1.85 mm | f0 (Low Frequency DELTA) | |
C110240 | 24.0 Ghz | 110.0 Ghz | ≥ 8:1 | 1 mm | f0 (Low Frequency DELTA) | |
C110500 | 50.0 GHz | 110.0 GHz | ≥ 10:1 (typ. 12:1) | 1 mm | f0 (Low Frequency DELTA) | |
C120270 | 27.0 GHz | 120.0 Ghz | ≥ 6.5:1 | 1 mm | f0 (Low Frequency DELTA) | |
L3018 | 1.8 GHz | 30.0 Ghz | 10:1 - 50:1 | 3.5 mm | f0, 2f0 (Low Frequency DELTA) | |
L3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
L4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
L4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
L4080B | 8.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
L5060B | 6.0 | 50.0 | 7:1 - 50:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
L5080B | 8.0 | 50.0 | 10:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
L6750B | 5.0 GHz | 67.0 | 6:1 - 50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
L67100B | 10.0 GHz | 67.0 | 10:1-50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
L110240 | 24.0 GHz | 110.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
L120270 | 27.0 GHz | 120.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
M3018 | 1.8 Ghz | 30.0 | 10:1 - 50:1 | 3.5 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M4080B | 8.0 Ghz | 40.0 Ghz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M5060B | 6.0 GHz | 50.0 GHz | 7:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M5080B | 8.0 Ghz | 50.0 GHz | 10:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M6750B | 5.0 Ghz | 67.0 Ghz | 6:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M67100B | 10.0 GHz | 67.0 GHz | 10:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M110240 | 24.0 Ghz | 110.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
M120270 | 27.0 Ghz | 120.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) |
More Product Information


- Repair-focused environment for XJDeveloper / XJRunner tests.
- Full Connection test.
- RAM, Flash and other non-JTAG device tests.
- Flash, FPGA, CPLD and EEPROM programming.
- Layout Viewer* to show the physical location of faulty nets, pins and components.
- Schematic Viewer* to show the circuit design around faults.
- Direct control of the pins/balls of JTAG devices.
- View pin states graphically in real time or capture them in the Waveform Viewer.
- Trace signals to identify shorts, opens and other faults.

of the cold-source noise figure measurement technique. This specific technique requires a noise source to determine the kBG (gain-bandwidth constant) of the system and a passive mechanical tuner is used to characterize the noise receiver across both the impedance and frequency space. This step is imperative to obtain fully vector-source-corrected measurements.
A RF down conversion stage might be required if the frequency of noise measured exceeds the receiver’s bandwidth. Focus offers noise modules which support down conversion for optimal speed and performance.

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Easy and fast setup of camera views
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Go to Light and Image Settings of the selected camera view with only one mouse click
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Guided workflows for wafer setups, alignment tools and Autonomous Assistants
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Workflow wizard shows task-relevant settings and options only
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Visualizes the progress of setup, alignment and measurement tasks
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Status information always at hand
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Informs the user about events, for example “Successful Alignment”
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Interacts with the user and helps with intelligent solutions
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For very complex wafer structures
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Enables automatic test of multiple devices in each die location before stepping to the next die

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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Ice- and condensation-free probing down to 77 K (liquid nitrogen) or below 20 K (liquid helium)
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Probe positioners placed inside vacuum chamber
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Joystick controller
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Manual probe positioners with rotary feed-throughs
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User-centered design minimizes training costs and enhances efficiency
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Comprehensive alignment functions – from simple wafer alignment and mapping to automated alignment and test of multiple singulated chips, like IR – Focal Plane Arrays

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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Joystick controller
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Manual probe positioners with rotary feed-throughs
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
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User-centered design minimizes training costs and enhances efficiency


Focus’ modular microstrip, high power and ultra low loss coaxial RF Test Fixtures are designed mainly for load pull testing of packaged transistors. All Focus test fixtures come with TRL calibration standards and support most transistor packages sized from less than 0.1″ and up to 1″.

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Provides an effectively noise free environment around the device under test (DUT)
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World’s first probe station with integrated TestCell Power Management (a TestCell is a connected set of equipment, including test software, instruments, probe station, thermal system, and related measurement accessories such as cables and on-wafer probes)
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Up to 4x faster flicker noise thermal testing on 30 μm pads
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Provides dark and dry environment for measuring light sensitive transistors, and devices at negative temperatures (<= -60°C) with frost free operation
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Provides fully managed and filtered AC power to the entire system – prober and instruments
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Filters harmful noise generated by external thermal control systems
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Reduced “antenna effect” injection of unwanted RF noise into the measurement path
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Provide up to 100dB attenuation (50Hz to 80Mhz) with 100mA max DC current handling
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Ultra-low, fA-level current and fF-level capacitance measurements from -65 °C to + 300 °C
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Enables full access to the chuck and the auxiliary sites
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Intuitive, and precise movement of chuck in X, Y, and Z-direction
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User-centered design minimizes training costs and enhances efficiency
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Test automation out-of-cassette for higher test cell efficiency for over-night/over-weekend operation

Focus Microwaves
Focus Microwaves is a pioneering engineering company, built around the innovations of its founder Dr. Christos Tsironis who developed his first manual tuner in 1973 and is the inventor of most existing electro-mechanical tuner families. The success of Focus is based on the engineering and manufacturing skills of its highly motivated and experienced team of engineers and technicians, who have been trained and encouraged to develop new technologies. In addition, listening to our customers needs and insights helps us discover and develop new and measurement methods on an ongoing basis, relentlessly pushing the limits of what is possible.
From humble beginnings in 1988, Focus has become the main supplier of advanced Load Pull and Noise Tuner Systems. Our mission is to provide effective, reliable and innovative solutions for non-50 Ohm testing (Noise and Load Pull) of RF microwave transistors, thus enabling our customers to compete in the marketplace with better designs and to advance the understanding and knowledge of the field.
Contact Details
Focus Microwaves Inc. Main Head Office
4555 Chem. du Bois-Franc, Saint-Laurent, QC H4S 1A8, Canada
Phone: +1-514-684-4554
Test & Measurement




