Focus Microwaves - On-Wafer Delta Tuners
Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.
- 120GHz Delta | 24-120GHz F0, 2F0, 3F0
- High Frequency Delta | 2-50GHz F0
- High Frequency Delta | 5-67GHz F0, 2F0, 3F0
- Low Frequency Delta | 1.8-40GHz F0, 2F0, 3F0
Integrations | Delta Tuners for On-Wafer Measurements
-
Integration with FormFactor
- Integration with MPI
On-Wafer DELTA Tuners' List
Model |
Min Frequency |
Max Frequency |
VSWR |
Connector Type |
Type |
Datasheets |
| C2607 | 0.7 GHz | 26.5 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3018 | 1.8 GHz | 30.0 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3620 | 2.0 GHz | 36.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4030 | 3.0 GHz | 40.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4060B | 6.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4080B | 8.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C5020B | 2.0 GHz | 50.0 GHz | ≥ 10:1 | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5060B | 6.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5080B | 8.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C6750B | 5.0 Ghz | 67.0 GHz | ≥ 6:1 | 1.85 mm | f0 (Low Frequency DELTA) | |
| C67100B | 10.0 GHz | 67.0 GHz | ≥ 10:1 (typ. 15:1) | 1.85 mm | f0 (Low Frequency DELTA) | |
| C110240 | 24.0 Ghz | 110.0 Ghz | ≥ 8:1 | 1 mm | f0 (Low Frequency DELTA) | |
| C110500 | 50.0 GHz | 110.0 GHz | ≥ 10:1 (typ. 12:1) | 1 mm | f0 (Low Frequency DELTA) | |
| C120270 | 27.0 GHz | 120.0 Ghz | ≥ 6.5:1 | 1 mm | f0 (Low Frequency DELTA) | |
| L3018 | 1.8 GHz | 30.0 Ghz | 10:1 - 50:1 | 3.5 mm | f0, 2f0 (Low Frequency DELTA) | |
| L3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4080B | 8.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5060B | 6.0 | 50.0 | 7:1 - 50:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5080B | 8.0 | 50.0 | 10:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L6750B | 5.0 GHz | 67.0 | 6:1 - 50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L67100B | 10.0 GHz | 67.0 | 10:1-50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L110240 | 24.0 GHz | 110.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| L120270 | 27.0 GHz | 120.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| M3018 | 1.8 Ghz | 30.0 | 10:1 - 50:1 | 3.5 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4080B | 8.0 Ghz | 40.0 Ghz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5060B | 6.0 GHz | 50.0 GHz | 7:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5080B | 8.0 Ghz | 50.0 GHz | 10:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M6750B | 5.0 Ghz | 67.0 Ghz | 6:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M67100B | 10.0 GHz | 67.0 GHz | 10:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M110240 | 24.0 Ghz | 110.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M120270 | 27.0 Ghz | 120.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) |
More Product Information
-
3 Measurement States; Quiescent (OFF-State), Non Quiescent (ON-State), and Pre-State
-
-
The Pre State is a short high voltage state used to activate
the traps in the semiconductor.
-
-
-
Adjustable delay (Δt) between the Pre state and Non Quiescent state down to 0s.
-
Independently adjustable timing settings for the Three-state gate pulser and drain pulser
-
Easy Integration into existing mainframes
Focus offers a complete range of manual tuners. The MMT series use the same RF technology and precision as a comparable automatic tuner.
They are available in octave and multi-octave bands between 400 MHz and 18 GHz and provide high VSWR at DUT reference plane with a high reliability.
For harmonic tuning requirements, the MMT series can be enhanced, referring to as option –H2 and –H23, using a similar concept as Focus’ harmonic rejection tuners (PHT).
For more information on Automated Tuners, Click here!
- The LL167 Series provides a focused line of illumination in a passively cooled design.
- Only available in White (for color illumination in a similar package refer to our LL137 Series).
- Provides a high intensity level of 472kLux (working distance of 75mm).
- Available in pre-engineered sizes from 6” (152mm) to 96” (2438mm) in 6″ increments.
- A 3″ (75mm) length option is also available.
- Available intensity control provides illuminance adjustability for every 6″ increment via a 0 – 10v input
Focus recommends TRL Calibration Kits for applications such as load pull & noise parameters. Due to high reflection and low loss, tuner S-parameter measurements represent a challenge for VNA’s, because of error term determination and coupler directivity. Long experience has taught us not to rely on other calibration techniques than TRL (Thru-Reflect-Line). The popular SOLT technique is conditionally useable, but not guaranteed, up to 4GHz. The much convenient ECal method has provided questionable and inconsistent results. Our Customers are advised to be very careful with VNA calibrations, because the whole measured data depends on that.
Because of this, and to save our customers time and doubt, Focus has developed and offers a set of precise and reliable TRL calibration kits from 0.03 to 110 GHz with the following connector types: 7/16, N, APC-7, 3.5mm, 2.9mm, 2.4mm, 1.85mm, WR-15, WR-10. Our calibration kits are compatible with all commercial network analyzers.
For more information on TRL Calibration Kits, please read the following paper on TRL Versus SOLT
The Focus Compact Model (FCM) utility is a streamlined software package designed to be used with Focus’ AURIGA high-end Pulsed-IV system, that is used to generate Compact Models for transistors from their Pulsed-IV and wideband pulsed s-parameter data.
This is achieved by generating a network of lumped circuit elements that represent accurately the fundamental linear & non-linear behavior of the device over a broad range of bias and power range.
The result of the modeling is a netlist and compatible with- the most common CAD tools used in RF Design; such as AWR Microwave office (MWO) and Keysight PathWave Advanced Design System (ADS).
- Tiny “all-in-one” solution: no external control board needed
- Superior image quality: sub-micron lens movement with very low tilt. Now with higher dynamic stability
- Low voltage & power: 3.3 VDC input, zero power position hold
- Simple system integration: accepts high-level motion commands over standard serial interface (I2C or SPI)
- Flexible, production-ready system: compatible with M8 to M16 lenses and with typical image formats from 1/3” to 1/1.8”
- Lowest cost, fastest time to market: Fully-engineered “plug and play” solution
-
Ease of use – Less experienced operators can perform DC measurements by simply pushing a button. This reduces the need of experienced users full time on each system.
-
Reduced Soak Time – The system will automatically re-align the probes to the pads if they drift from alignment. This reduces test time and increases throughput.
-
Unattended Use – Measurements can be left running over night or the weekend, testing all devices on the wafer, and at different temperatures without the need of an operator.
Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.
An impedance tuner is an apparatus, which generates controllable reflection factor (Impedance) over a certain frequency range. Focus uses two basic technologies:
a) For frequencies from 100MHz to 110GHz (and above) we use the slide screw technique (models Multi Harmonic MPT, wideband (fundamental) CCMT, harmonic rejection PHT), in which a reflective probe (slug) is inserted into the slot of a low loss slotted transmission line (slabline or waveguide).
b) For frequencies from below 10MHz to 170MHz we use a lumped element technology (models LFT), whereby variable capacitors are connected with optimized lengths of coaxial cable.
Focus Microwaves
Focus Microwaves is a pioneering engineering company, built around the innovations of its founder Dr. Christos Tsironis who developed his first manual tuner in 1973 and is the inventor of most existing electro-mechanical tuner families. The success of Focus is based on the engineering and manufacturing skills of its highly motivated and experienced team of engineers and technicians, who have been trained and encouraged to develop new technologies. In addition, listening to our customers needs and insights helps us discover and develop new and measurement methods on an ongoing basis, relentlessly pushing the limits of what is possible.
From humble beginnings in 1988, Focus has become the main supplier of advanced Load Pull and Noise Tuner Systems. Our mission is to provide effective, reliable and innovative solutions for non-50 Ohm testing (Noise and Load Pull) of RF microwave transistors, thus enabling our customers to compete in the marketplace with better designs and to advance the understanding and knowledge of the field.
Contact Details
Focus Microwaves Inc. Main Head Office
4555 Chem. du Bois-Franc, Saint-Laurent, QC H4S 1A8, Canada
Phone: +1-514-684-4554
Test & Measurement
Download Line Card
Document
