Focus Microwaves - On-Wafer Delta Tuners
Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.
- 120GHz Delta | 24-120GHz F0, 2F0, 3F0
- High Frequency Delta | 2-50GHz F0
- High Frequency Delta | 5-67GHz F0, 2F0, 3F0
- Low Frequency Delta | 1.8-40GHz F0, 2F0, 3F0
Integrations | Delta Tuners for On-Wafer Measurements
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Integration with FormFactor
- Integration with MPI
On-Wafer DELTA Tuners' List
Model |
Min Frequency |
Max Frequency |
VSWR |
Connector Type |
Type |
Datasheets |
| C2607 | 0.7 GHz | 26.5 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3018 | 1.8 GHz | 30.0 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3620 | 2.0 GHz | 36.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4030 | 3.0 GHz | 40.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4060B | 6.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4080B | 8.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C5020B | 2.0 GHz | 50.0 GHz | ≥ 10:1 | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5060B | 6.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5080B | 8.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C6750B | 5.0 Ghz | 67.0 GHz | ≥ 6:1 | 1.85 mm | f0 (Low Frequency DELTA) | |
| C67100B | 10.0 GHz | 67.0 GHz | ≥ 10:1 (typ. 15:1) | 1.85 mm | f0 (Low Frequency DELTA) | |
| C110240 | 24.0 Ghz | 110.0 Ghz | ≥ 8:1 | 1 mm | f0 (Low Frequency DELTA) | |
| C110500 | 50.0 GHz | 110.0 GHz | ≥ 10:1 (typ. 12:1) | 1 mm | f0 (Low Frequency DELTA) | |
| C120270 | 27.0 GHz | 120.0 Ghz | ≥ 6.5:1 | 1 mm | f0 (Low Frequency DELTA) | |
| L3018 | 1.8 GHz | 30.0 Ghz | 10:1 - 50:1 | 3.5 mm | f0, 2f0 (Low Frequency DELTA) | |
| L3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4080B | 8.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5060B | 6.0 | 50.0 | 7:1 - 50:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5080B | 8.0 | 50.0 | 10:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L6750B | 5.0 GHz | 67.0 | 6:1 - 50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L67100B | 10.0 GHz | 67.0 | 10:1-50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L110240 | 24.0 GHz | 110.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| L120270 | 27.0 GHz | 120.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| M3018 | 1.8 Ghz | 30.0 | 10:1 - 50:1 | 3.5 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4080B | 8.0 Ghz | 40.0 Ghz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5060B | 6.0 GHz | 50.0 GHz | 7:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5080B | 8.0 Ghz | 50.0 GHz | 10:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M6750B | 5.0 Ghz | 67.0 Ghz | 6:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M67100B | 10.0 GHz | 67.0 GHz | 10:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M110240 | 24.0 Ghz | 110.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M120270 | 27.0 Ghz | 120.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) |
More Product Information
Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.
Non-linear measurement data is often used to create a behavioral model for high frequency components. Formulations of these models have been defined in terms of traveling waves, with a desire to represent nonlinear behavior of high frequency transistors through a direct extension from linear s-parameters.
The Mesuro model portfolio is comprised of two variations of a behavioral model – each targeted at a particular end use – Cardiff Model Lite (CML), where the desired output is a local model, and Cardiff Model+ (CM+), which incorporates higher order mixing terms allowing a single model to fit over a range of impedance space.
Noise measurements allow the determination of the four Noise Parameters of a device (transistor). Focus’ Noise Modules integrate well with various third party noise receivers.
Noise Parameters: These are four numbers that fully describe the noise behaviour of an active or passive device (twoport) at a given frequency. For practical reasons we use the following quantities as Noise Parameters:
Focus’ noise parameter extraction routines leverage the PNA-X’s unique implementation
of the cold-source noise figure measurement technique. This specific technique requires a noise source to determine the kBG (gain-bandwidth constant) of the system and a passive mechanical tuner is used to characterize the noise receiver across both the impedance and frequency space. This step is imperative to obtain fully vector-source-corrected measurements.
of the cold-source noise figure measurement technique. This specific technique requires a noise source to determine the kBG (gain-bandwidth constant) of the system and a passive mechanical tuner is used to characterize the noise receiver across both the impedance and frequency space. This step is imperative to obtain fully vector-source-corrected measurements.
A RF down conversion stage might be required if the frequency of noise measured exceeds the receiver’s bandwidth. Focus offers noise modules which support down conversion for optimal speed and performance.
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High power capability: +/- 200V, 17A.
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Minimum pulse width: 200ns.
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Modular design which enables multiple configurations.
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Shared library. The MPIV can be used as a standalone instrument using an ActiveX library, which easily integrates into existing test software.
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Flexible Input/Output. Choose between high power and high precision pulse modules to create a customized setup for your specific application.
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Compatible with Focus Microwaves’ device characterization software (Load Pull Explorer, LPEx)
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Different substrate carriers for wafers up to 150 mm or single dies
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Up to six positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Ergonomic and straightforward design
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Intuitive, manual operation
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Independent control of linear chuck stage and positioners
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Contact/separation stroke for probe platen
See more Key Features on Specifications & Details tab
The LWP series Lightwave Probe enables optical measurements for on-wafer and hybrid photonics devices. It features user replaceable fiber pigtails allowing the probe to be optimized for a variety of light delivery and light collection applications including the characterization of topside illuminated photodiodes, Vertical Cavity Surface Emitting Lasers (VCSELs), hybrid transmitters and receivers, and LEDs.
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Revolutionary technology advancement for wafer and die-level photonics probing
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Real-time in-situ calibrations
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Highest accuracy in test results
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Lowest coupling loss
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New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
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Minimized coupling losses with minimal trench dimensions
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Industry standard for vertical coupling to wafer-level grating couplers
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Dark, shielded and frost-free
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-40°C to +125°C
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Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
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Exclusive FormFactor-developed automated test methodology
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FormFactor-developed graphical user interface to manually control the optical positioning system
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Configurable between single fibers, fiber arrays and edge coupling holders
See more Key Features on Specifications & Details tab
- The LL167 Series provides a focused line of illumination in a passively cooled design.
- Only available in White (for color illumination in a similar package refer to our LL137 Series).
- Provides a high intensity level of 472kLux (working distance of 75mm).
- Available in pre-engineered sizes from 6” (152mm) to 96” (2438mm) in 6″ increments.
- A 3″ (75mm) length option is also available.
- Available intensity control provides illuminance adjustability for every 6″ increment via a 0 – 10v input
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Revolutionary technology advancement for wafer and die-level photonics probing
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Highest accuracy in test results
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New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
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Minimized coupling losses with minimal trench dimensions
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Industry standard for vertical coupling to wafer-level grating couplers
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Positioning hardware is precisely calibrated to the probe station and ready to perform die-to-die optical optimizations in minutes
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Dark, shielded and frost-free
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-40°C to +125°C
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Leveraging considerable expertise through an innovative engineering team
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Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
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Exclusive FormFactor-developed automated test methodology
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Automates manual tasks by integrating probe station machine vision capability with optical positioning and test equipment
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FormFactor-developed graphical user interface to manually control the optical positioning system
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Configurable between single fibers, fiber arrays and edge coupling holders
See more Key Features on Specifications & Details tab
Focus Microwaves
Focus Microwaves is a pioneering engineering company, built around the innovations of its founder Dr. Christos Tsironis who developed his first manual tuner in 1973 and is the inventor of most existing electro-mechanical tuner families. The success of Focus is based on the engineering and manufacturing skills of its highly motivated and experienced team of engineers and technicians, who have been trained and encouraged to develop new technologies. In addition, listening to our customers needs and insights helps us discover and develop new and measurement methods on an ongoing basis, relentlessly pushing the limits of what is possible.
From humble beginnings in 1988, Focus has become the main supplier of advanced Load Pull and Noise Tuner Systems. Our mission is to provide effective, reliable and innovative solutions for non-50 Ohm testing (Noise and Load Pull) of RF microwave transistors, thus enabling our customers to compete in the marketplace with better designs and to advance the understanding and knowledge of the field.
Contact Details
Focus Microwaves Inc. Main Head Office
4555 Chem. du Bois-Franc, Saint-Laurent, QC H4S 1A8, Canada
Phone: +1-514-684-4554
Test & Measurement
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