Focus Microwaves - On-Wafer Delta Tuners
Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.
- 120GHz Delta | 24-120GHz F0, 2F0, 3F0
- High Frequency Delta | 2-50GHz F0
- High Frequency Delta | 5-67GHz F0, 2F0, 3F0
- Low Frequency Delta | 1.8-40GHz F0, 2F0, 3F0
Integrations | Delta Tuners for On-Wafer Measurements
-
Integration with FormFactor
- Integration with MPI
On-Wafer DELTA Tuners' List
Model |
Min Frequency |
Max Frequency |
VSWR |
Connector Type |
Type |
Datasheets |
| C2607 | 0.7 GHz | 26.5 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3018 | 1.8 GHz | 30.0 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3620 | 2.0 GHz | 36.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4030 | 3.0 GHz | 40.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4060B | 6.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4080B | 8.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C5020B | 2.0 GHz | 50.0 GHz | ≥ 10:1 | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5060B | 6.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5080B | 8.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C6750B | 5.0 Ghz | 67.0 GHz | ≥ 6:1 | 1.85 mm | f0 (Low Frequency DELTA) | |
| C67100B | 10.0 GHz | 67.0 GHz | ≥ 10:1 (typ. 15:1) | 1.85 mm | f0 (Low Frequency DELTA) | |
| C110240 | 24.0 Ghz | 110.0 Ghz | ≥ 8:1 | 1 mm | f0 (Low Frequency DELTA) | |
| C110500 | 50.0 GHz | 110.0 GHz | ≥ 10:1 (typ. 12:1) | 1 mm | f0 (Low Frequency DELTA) | |
| C120270 | 27.0 GHz | 120.0 Ghz | ≥ 6.5:1 | 1 mm | f0 (Low Frequency DELTA) | |
| L3018 | 1.8 GHz | 30.0 Ghz | 10:1 - 50:1 | 3.5 mm | f0, 2f0 (Low Frequency DELTA) | |
| L3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4080B | 8.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5060B | 6.0 | 50.0 | 7:1 - 50:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5080B | 8.0 | 50.0 | 10:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L6750B | 5.0 GHz | 67.0 | 6:1 - 50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L67100B | 10.0 GHz | 67.0 | 10:1-50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L110240 | 24.0 GHz | 110.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| L120270 | 27.0 GHz | 120.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| M3018 | 1.8 Ghz | 30.0 | 10:1 - 50:1 | 3.5 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4080B | 8.0 Ghz | 40.0 Ghz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5060B | 6.0 GHz | 50.0 GHz | 7:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5080B | 8.0 Ghz | 50.0 GHz | 10:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M6750B | 5.0 Ghz | 67.0 Ghz | 6:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M67100B | 10.0 GHz | 67.0 GHz | 10:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M110240 | 24.0 Ghz | 110.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M120270 | 27.0 Ghz | 120.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) |
More Product Information
-
On-wafer power device characterization up to 10,000 V DC / 600 A
-
Safe and convenient integration kits to support T.I.P.S. “LuPo” High Voltage / High Power Probe Cards
-
Prevent thin wafers from curling and breaking
-
Safety interlock system with clear enclosure for operator safety during device measurements
-
Convenient connection kits for easy and safe system integration with power device analyzers from Keysight Technologies and major suppliers
-
Up to 25% lower air consumption (CDA) than other systems in the market (300l/min) with no compromise in transition times
-
Windows 10 compatibility enables highest performance and safe operation with state-of-the-art hardware
See more Key Features on Specifications & Details tab
Comprehensive, Turn-key Integrated Measurement System (IMS) with Keysight PNA for On-wafer R&D Measurements from RF to millimeter wave to Terahertz
-
Supports up to 12 VNA ports than can be mapped to four logical ports for calibration
-
Extensive guidance, wizards and management features automate calibration setup, measurement, result data conversion and report creation
-
LRRM-SOLT, multi-line TRL and second-tier calibration methods enable precision and simple multi-port calibrations
-
Automatic load inductance compensation function ensures the most repeatable calibrations
-
Easy to use Probe to ISS/CSR matching tool
-
Additional remoting methods
-
Interface with Velox™ over LAN
-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Joystick controller
-
Manual probe positioners with rotary feed-throughs
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer
-
User-centered design minimizes training costs and enhances efficiency
See more Key Features on Specifications & Details tab
-
Revolutionary technology advancement for wafer and die-level photonics probing
-
Real-time in-situ calibrations
-
Highest accuracy in test results
-
Lowest coupling loss
-
New innovative combination of hardware and software features to align and optimize fibers/arrays in a wafer-level trench
-
Minimized coupling losses with minimal trench dimensions
-
Industry standard for vertical coupling to wafer-level grating couplers
-
Dark, shielded and frost-free
-
-40°C to +125°C
-
Pioneering set of automated functions that perform critical calibrations of the optical positioning system to the probe station
-
Exclusive FormFactor-developed automated test methodology
-
FormFactor-developed graphical user interface to manually control the optical positioning system
-
Configurable between single fibers, fiber arrays and edge coupling holders
See more Key Features on Specifications & Details tab
-
High spatial resolution
-
IEEE 1588 PTP
-
Power over Ethernet
-
Defect pixel masking
-
Monochrome (GT6400) and color (GT6400C) models
-
Screw mount RJ45 Ethernet connector for secure operation in industrial environments
-
Supports cable lengths up to 100 meters (CAT-6 recommended)
-
Trigger over Ethernet Action Commands allow for a single cable solution to reduce system costs
-
Comprehensive I/O functionality for simplified system integration
-
Planarity adjusted (PA) EF Lens Mount (option -18) for electronic control of aperture and autofocus
-
Easy camera mounting via standard M3 threads at all sides and 1/4-20 tripod mounting hole
-
Defect pixel masking feature with the Defect Mask Loader tool that allows you to manage a user defined defective pixel list to match your application and optimize the life cycle of the camera.
-
Easy software integration with Allied Vision's Vimba Suite and compatibility to the most popular third party image-processing libraries.
-
Wafer temp verified <4.5 K (with 44 RF probes in contact)
-
Magnetic field suppression to <200 nT
-
Easy exchange of customizable probe cards
-
Configurable for 150 mm, 200 mm and 300 mm wafers
-
Options for fully automated wafer load or manual
-
Complete software suite for manual, semi-auto, or fully automated probing
-
25 wafer cassette capacity for fully automated testing
-
~15 minute cooldown time per wafer
See more Key Features in Specifications & Details tab
-
Different substrate carriers for wafers up to 200 mm or single dies
-
Probe cards and/or up to eight positioners
-
Probe positioners placed inside vacuum chamber
-
Short and stable probe arms
-
Joystick controller
-
Manual probe positioners with rotary feed-throughs
-
Software control of chuck for fast step-and-repeat testing of the entire wafer
-
Fast step-and-repeat testing of the whole wafer
-
User-centered design minimizes training costs and enhances efficiency
Focus Microwaves
Focus Microwaves is a pioneering engineering company, built around the innovations of its founder Dr. Christos Tsironis who developed his first manual tuner in 1973 and is the inventor of most existing electro-mechanical tuner families. The success of Focus is based on the engineering and manufacturing skills of its highly motivated and experienced team of engineers and technicians, who have been trained and encouraged to develop new technologies. In addition, listening to our customers needs and insights helps us discover and develop new and measurement methods on an ongoing basis, relentlessly pushing the limits of what is possible.
From humble beginnings in 1988, Focus has become the main supplier of advanced Load Pull and Noise Tuner Systems. Our mission is to provide effective, reliable and innovative solutions for non-50 Ohm testing (Noise and Load Pull) of RF microwave transistors, thus enabling our customers to compete in the marketplace with better designs and to advance the understanding and knowledge of the field.
Contact Details
Focus Microwaves Inc. Main Head Office
4555 Chem. du Bois-Franc, Saint-Laurent, QC H4S 1A8, Canada
Phone: +1-514-684-4554
Test & Measurement
Download Line Card
Document
