Focus Microwaves - On-Wafer Delta Tuners
Focus Microwaves’ DELTA series of electro-mechanical tuners is designed specifically for high frequency on wafer measurements. The tuner’s low profile allows it to be placed within the wafer perimeter and allows for a direct connection between the probe tip and the tuner, eliminating all possible insertion loss between the DUT and the tuner. This revolutionary new tuner design enables the engineer to achieve optimum tuning range, with a tuner whose footprint and weight has been dramatically reduced.
- 120GHz Delta | 24-120GHz F0, 2F0, 3F0
- High Frequency Delta | 2-50GHz F0
- High Frequency Delta | 5-67GHz F0, 2F0, 3F0
- Low Frequency Delta | 1.8-40GHz F0, 2F0, 3F0
Integrations | Delta Tuners for On-Wafer Measurements
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Integration with FormFactor
- Integration with MPI
On-Wafer DELTA Tuners' List
Model |
Min Frequency |
Max Frequency |
VSWR |
Connector Type |
Type |
Datasheets |
| C2607 | 0.7 GHz | 26.5 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3018 | 1.8 GHz | 30.0 GHz | ≥ 10:1 (typ. 15:1) | 3.5 mm | f0 (Low Frequency DELTA) | |
| C3620 | 2.0 GHz | 36.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4030 | 3.0 GHz | 40.0 GHz | ≥ 10:1 (typ. 15:1) | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4060B | 6.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C4080B | 8.0 GHz | 40.0 GHz | ≥ 10:1 | 2.92 mm | f0 (Low Frequency DELTA) | |
| C5020B | 2.0 GHz | 50.0 GHz | ≥ 10:1 | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5060B | 6.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C5080B | 8.0 GHz | 50.0 GHz | ≥ 10:1 (typ. 15:1) | 2.4 mm | f0 (Low Frequency DELTA) | |
| C6750B | 5.0 Ghz | 67.0 GHz | ≥ 6:1 | 1.85 mm | f0 (Low Frequency DELTA) | |
| C67100B | 10.0 GHz | 67.0 GHz | ≥ 10:1 (typ. 15:1) | 1.85 mm | f0 (Low Frequency DELTA) | |
| C110240 | 24.0 Ghz | 110.0 Ghz | ≥ 8:1 | 1 mm | f0 (Low Frequency DELTA) | |
| C110500 | 50.0 GHz | 110.0 GHz | ≥ 10:1 (typ. 12:1) | 1 mm | f0 (Low Frequency DELTA) | |
| C120270 | 27.0 GHz | 120.0 Ghz | ≥ 6.5:1 | 1 mm | f0 (Low Frequency DELTA) | |
| L3018 | 1.8 GHz | 30.0 Ghz | 10:1 - 50:1 | 3.5 mm | f0, 2f0 (Low Frequency DELTA) | |
| L3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L4080B | 8.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5060B | 6.0 | 50.0 | 7:1 - 50:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L5080B | 8.0 | 50.0 | 10:1 | 2.4 mm | f0, 2f0 (Low Frequency DELTA) | |
| L6750B | 5.0 GHz | 67.0 | 6:1 - 50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L67100B | 10.0 GHz | 67.0 | 10:1-50:1 | 1.85 mm | f0, 2f0 (Low Frequency DELTA) | |
| L110240 | 24.0 GHz | 110.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| L120270 | 27.0 GHz | 120.0 | 6:1 - 30:1 | 1 mm | f0, 2f0 (Low Frequency DELTA) | |
| M3018 | 1.8 Ghz | 30.0 | 10:1 - 50:1 | 3.5 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M3620 | 2.0 Ghz | 36.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4030 | 3.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4060B | 6.0 GHz | 40.0 GHz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M4080B | 8.0 Ghz | 40.0 Ghz | 10:1 - 50:1 | 2.92 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5060B | 6.0 GHz | 50.0 GHz | 7:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M5080B | 8.0 Ghz | 50.0 GHz | 10:1 - 50:1 | 2.4 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M6750B | 5.0 Ghz | 67.0 Ghz | 6:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M67100B | 10.0 GHz | 67.0 GHz | 10:1 - 50:1 | 1.85 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M110240 | 24.0 Ghz | 110.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) | |
| M120270 | 27.0 Ghz | 120.0 Ghz | 6:1 - 30:1 | 1 mm | f0, 2f0, 3f0 (Low Frequency DELTA) |
More Product Information
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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Independently cooled cold shield
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Probe positioners placed inside vacuum chamber
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Intuitive, manual drives
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Front loading capability through load door
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Independent control of linear chuck stage and positioners
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Contact/separation stroke for chuck
See more Key Options in Specifictions & Details tab
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Re-configurable for DC, RF, mmW, FA, WLR and more
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Thermal range: -60˚C to 300˚C available
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Upgrade path to meet your future needs
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Stable and repeatable measurements over a wide thermal range
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Moisture-free, light-tight and EMI-shielded test environment with MicroChamber® technology
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Advanced EMI-shielding with PureLine with AttoGuard technologies
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Best solution for low-noise and 1/f measurements
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Minimize AC and spectral noise
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Minimizes settling times for efficient measurements, without compromising accuracy over full thermal range
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Locking roll-out stage
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Innovative microscope remote control
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Intuitive ergonomic stage controls
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Quick, safe, and comfortable wafer access
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Easy on-wafer navigation
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Fast setup and test data gathering
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Dedicated Velox version for manual probe stations
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AugmentedAlign tool with on screen markers for improved RF measurement accuracy
Focus offers a complete range of manual tuners. The MMT series use the same RF technology and precision as a comparable automatic tuner.
They are available in octave and multi-octave bands between 400 MHz and 18 GHz and provide high VSWR at DUT reference plane with a high reliability.
For harmonic tuning requirements, the MMT series can be enhanced, referring to as option –H2 and –H23, using a similar concept as Focus’ harmonic rejection tuners (PHT).
For more information on Automated Tuners, Click here!
The LN112-30 Lens Adaptor is used for creating a 30° focused beam spread when attached to a SL112 or SL162.
Noise measurements allow the determination of the four Noise Parameters of a device (transistor). There are four Noise Parameters which fully describe the noise behaviour of an active or passive device at a given frequency.
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High spatial resolution
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IEEE 1588 PTP
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Power over Ethernet
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Defect pixel masking
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Monochrome (GT5400) and color (GT5400C) models
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Screw mount RJ45 Ethernet connector for secure operation in industrial environments
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Supports cable lengths up to 100 meters (CAT-6 recommended)
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Trigger over Ethernet Action Commands allow for a single cable solution to reduce system costs
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Comprehensive I/O functionality for simplified system integration
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Planarity adjusted (PA) EF Lens Mount (option -18) for electronic control of aperture and autofocus
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Easy camera mounting via standard M3 threads at all sides and 1/4-20 tripod mounting hole
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Defect pixel masking feature with the Defect Mask Loader tool that allows you to manage a user defined defective pixel list to match your application and optimize the life cycle of the camera.
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Easy software integration with Allied Vision's Vimba Suite and compatibility to the most popular third party image-processing libraries.
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Different substrate carriers for wafers up to 200 mm or single dies
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Probe cards and/or up to eight positioners
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Probe positioners placed inside vacuum chamber
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Short and stable probe arms
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Intuitive, manual drives
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Front loading capability through load door
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Software control of chuck for fast step-and-repeat testing of the entire wafer
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Fast step-and-repeat testing of the whole wafer
See more Key Features on Specifications & Details tab
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Quick and easy probe tip navigation
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Z drive can work in the same range as the chuck
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Enables higher separation gap while the DUT stays in focus
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Automatically configure and optimize performance
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24/7 operating
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Increased MTBF
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Protects the measurement setup
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Prevents involuntary mechanical contact between lens and probes
See more Key Features in Specifications & Features tab
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Easy and fast setup of camera views
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Go to Light and Image Settings of the selected camera view with only one mouse click
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Guided workflows for wafer setups, alignment tools and Autonomous Assistants
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Workflow wizard shows task-relevant settings and options only
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Visualizes the progress of setup, alignment and measurement tasks
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Status information always at hand
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Informs the user about events, for example “Successful Alignment”
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Interacts with the user and helps with intelligent solutions
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For very complex wafer structures
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Enables automatic test of multiple devices in each die location before stepping to the next die
See more Key Features on Specifications & Details tab
Focus Microwaves
Focus Microwaves is a pioneering engineering company, built around the innovations of its founder Dr. Christos Tsironis who developed his first manual tuner in 1973 and is the inventor of most existing electro-mechanical tuner families. The success of Focus is based on the engineering and manufacturing skills of its highly motivated and experienced team of engineers and technicians, who have been trained and encouraged to develop new technologies. In addition, listening to our customers needs and insights helps us discover and develop new and measurement methods on an ongoing basis, relentlessly pushing the limits of what is possible.
From humble beginnings in 1988, Focus has become the main supplier of advanced Load Pull and Noise Tuner Systems. Our mission is to provide effective, reliable and innovative solutions for non-50 Ohm testing (Noise and Load Pull) of RF microwave transistors, thus enabling our customers to compete in the marketplace with better designs and to advance the understanding and knowledge of the field.
Contact Details
Focus Microwaves Inc. Main Head Office
4555 Chem. du Bois-Franc, Saint-Laurent, QC H4S 1A8, Canada
Phone: +1-514-684-4554
Test & Measurement
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