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AMETEK - OEM DC Power System for Semiconductor Manufacturing
OEM 6 channel DC source
- Single Package 6-Pack of 600W power supplies
- Complete self-contained controller operates independently once pre-set
- Capable of ramps and sequences
- Capable of inter-channel dependent operation
- DeviceNet Interface
- Solid State polarity switching
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Product |
OEM DC Power System for Semiconductor Manufacturing |
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Description |
Provides power to electro-polish 300mm wafers |
More Product Information
- Smallest size: 11.75 x 21.9 x 16 mm including controller
- Closed-loop controller embedded in micro stage
- No separate electronics needed
- 3.3 VDC input
- Direct input of motion commands (I2C, SPI, UART or analog servo)
- Angular resolution ~ 0.022 deg closed loop Absolute encoding and position feedback
- Millisecond step and settle times
- Point-to-point angular positioning with closed-loop bandwidth ~100Hz
- Holds position with zero power and no jitter
- Fast integration for embedded motion in smaller instruments
- Broadest Model Selection: 6kW, 9kW, 12kW, 18kW, 24kW, 36kW, Additional standard models above 36kW, up to 250kW, are available.
- Standard 60V, 120V, 400V, 600V, 800V and 1000V Voltage Ratings
- PLW Models Offer Ultra-compact Footprint and Boasts one of the industry’s highest power densities, 18kW in 2U.
- Anti-condensation: Intelligent Fully-integrated Temperature Control Circuit and Solenoid Valve
- Standard LabWindows and LabVIEW Drivers and SCPI Command Set
- RoHS Compliant
- Guaranteed performance to 43.5 GHz with Extended K™ ports
- High output power allows measurement of high attenuation devices
- Wide dynamic range enables measurement of very low reflection artifacts
- Excellent corrected directivity minimizes measurement uncertainty
- SmartCal™ auto calibration unit reduces calibration and setup time
- Time domain with time gating option grants easier and faster fault identification
- Modern LAN interface for remote control is faster than GPIB
- A common GUI and SCPI interface within the ShockLine family
- Bias tee option simplifies test setups where the DUT needs DC biasing
- Universal Fixture Extraction (UFX) software option provides advanced de-embedding tools for test fixture extraction
- E-Band VNA
- Extended frequency range covering E-band and major parts of V band
- Fully assembled test system eliminates setup errors and increases reliability
- Tethered modules connect directly to the DUT increasing measurement stability
Optimized Measurement Setup
- Multi-purpose SIGMA instrument integration kit
- Shorter cabling and universal chuck connection
- Triax probe with protected guard
- Optimized signal path
- Safe probe tip exchange
- Seamless integration of various analyzers
High Power Chuck
- Triax design for low-leakage measurements up to 3 kV
- Special chuck surface coating
- High-isolation ready
- High-current measurement up to 100 A with lowest contact resistance
- Optional upgrade for 10 kV (coax) operating voltage
- Thin wafer handling capability
Safe Operation
- Arcing protection
- Shield Enclosure with interlock
- Advanced grounding concept
- Maximum protection from high-voltage shock for users and devices
- Common ground protection for all instruments
- EMI/light-tight shielded environment
The award winning VXI Modular Instrumentation Platform (VMIP™) provides customers with a level of modularity for instruments that is unmatched in the industry. The VMIP™ makes a single VXIbus card slot three times more powerful than single device solutions. Each VMIP™ instrument can be mixed and matched with other VMIP™ devices for added flexibility.
- Single system power up to 650 kW Parallel system power up to 1.3 MW
- Output voltage up to 1,000 V
- Bidirectional output current up to ±1,000 A, up to ±2,000A in parallel
- Available in 1, 2 or 4 channel configurations
- Multiple channel units share internal DC Bus up to 2MW without drawing additional power from the AC Grid
- Regenerative to 96%
- Large 15-inch color touch panel
- Short circuit proof
- Designed for safety to EN ISO 13849-1
- Dedicated Battery Testing/Simulation Modes
- Seamless transition between source and sink
- High reliability, long life components
- Up to 12 contacts; any contact can be DC, Power, Logic to 500 MHz,or RF to 20 GHz
- Online design configuration tool helps you to specify your probe in minutes
- All designs are fully quadrant compatible
- Full solution includes probes, calibration substrates, stations, accessories and software
- Scalable architecture for future needs
Not all amplifiers are created equal, so how can you be certain that an amplifier will work for your needs? You deserve to be confident that the amplifiers used with your test-and measurement lab benches will meet the requirements of your specific applications, are reliable, and are equally well-supported pre-and post-sale. When it comes to application expertise, reliability and support, there is no company that does it better than Maury.
Not all amplifiers are created equal, so how can you be certain that an amplifier will work for your needs? You deserve to be confident that the amplifiers used with your test-and measurement lab benches will meet the requirements of your specific applications, are reliable, and are equally well-supported pre-and post-sale. When it comes to application expertise, reliability and support, there is no company that does it better than Maury.
AMETEK Programmable Power
Programmable Precision AC & DC Sources, Loads and Custom Power Solutions
